Titanium suboxide rotary targets are tubular ceramic sputtering targets specifically designed for continuous, high-efficiency coating. Their rotating motion ensures uniform etching of the target surface. Offering high utilization rates, high deposition rates, and extended service life, they are particularly suited for large-area, continuous industrial production at scale.
We offer TiOx rotating targets in multiple specifications, supporting metal or composite backing tube bonding. Comprehensive installation and maintenance technical support is available to meet your production line requirements.
Ultra-high material utilization rate (>80%)
Continuous stability with high deposition rates
Reduced sputtering nodules and excellent film uniformity
Customizable non-standard lengths
Integrated bonding technology
Large-Area Architectural Glass Coating: In continuous production lines for energy-efficient architectural glass, TiOx rotary targets enable efficient, uniform large-area coating, significantly boosting throughput and film consistency.
Flexible Roll-to-Roll Coating: Ideal for continuous roll-to-roll coating processes on flexible substrates (e.g., PET, PI films), delivering high-efficiency production solutions for flexible displays, flexible PV, and packaging industries.
Large-Area Display Panels: Used for electrode or functional layer preparation in large display panels like TFT-LCD and OLED, meeting stringent requirements for large-area uniformity and production cycle times in high-generation lines.
Continuous Optical Coating: Ensures long-term stability and repeatability of optical film thickness and performance in continuous production of optical filters, anti-reflective glass, and similar products.
Q1: What are the main advantages of rotary targets compared to planar targets?
A1: Core advantages lie in material utilization (typically over 80% for rotary targets vs. only about 30% for planar targets) and continuous operational lifespan. The rotary design enables larger, more uniform etching areas, significantly reducing target replacement frequency and overall production costs.
Q2: What are the typical length and wall thickness ranges for TiOx rotary targets?
A2: We customize lengths based on customer equipment cathode specifications, typically ranging from 1 to 6 meters. Wall thickness generally falls between 5mm and 20mm, depending on target diameter, bonding method, and designed service life.
Q3: How do you ensure structural reliability and cooling efficiency during high-speed operation?
A3: We utilize high-strength backing tube materials and optimized bonding processes to guarantee robust adhesion between the target and backing tube under thermal stress. Additionally, the precision water channel design within the backing tube enables efficient and uniform cooling, ensuring long-term stable target operation.
Q4: Does your company offer integrated bonding services for rotating targets?
A4: Yes. We provide a complete service from ceramic target tube fabrication to integrated welding and bonding with the backing tube. We conduct rigorous quality inspections (e.g., ultrasonic testing) on the bonding interface to ensure thermal conductivity, strength, and safety meet production requirements.
Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Size Inspection Report
Third-party testing reports available upon request
We not only supply high-performance TiOx ceramic targets but also deeply understand that the core of rotating target systems lies in reliability and production efficiency. Our mature integrated manufacturing and bonding technology ensures each target exhibits exceptional structural integrity and cooling efficiency.
Molecular formula: TiOₓ (x can be customized)
Appearance: Black to gray rotating target
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
If you need any service, please contact us
