Titanium Silicon Alloy sputtering targets are silicon-titanium metal-ceramic targets used to deposit Titanium Silicon Alloy films with excellent conductivity and thermal stability. They are primarily employed in the semiconductor and electronics industries.
We offer TiSi targets with varying silicon-titanium ratios and multiple specifications, along with backing plate bonding services for copper, aluminum, and other materials.
High Purity
Precise Si:Ti Ratio
Dense and Uniform Structure for Stable Sputtering
Superior Conductivity
Custom Specifications Available
Semiconductor Devices: Used for low-resistance contacts and interconnects in integrated circuits to enhance device performance.
Electronic Components: Manufacture of passive components like thin-film resistors and capacitors, ensuring stable performance.
Display Panels: Conductive thin-film layers within display panels, improving signal transmission efficiency.
Wear-Resistant Coatings: Preparation of high-hardness, low-friction wear-resistant coatings, extending tool lifespan.
Q1: What is the primary composition ratio of TiSi targets?
A1: We offer target materials with various Ti:Si ratios, commonly at 1:1, adjustable per specific application requirements.
Q2: How is target purity guaranteed?
A: We utilize high-purity raw materials and vacuum melting processes to ensure target purity reaches 99.9%.
Q3: Do you offer small-batch customization?
A3: Yes. We provide small-batch customization services tailored to customer requirements, including special dimensions, ratios, and bonding methods.
Q4: What is the shelf life of the target material?
A4: When stored sealed in a dry environment, the shelf life is up to 2 years. Surface cleaning is recommended prior to use.
Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Size Inspection Report
Third-party testing reports available upon request
We possess mature metal-ceramic target preparation technology, specializing in providing high-quality TiSi sputtering targets. From raw material selection to finished product inspection, we implement strict quality control to ensure stable and reliable product performance. We offer professional technical support and customized services, making us your trus
Molecular Formula: TiSi
Appearance: Silver-gray target material
Density: Approx. 4.5 g/cm³
Melting Point: Approx. 1670 °C
Crystal Structure: Body-centered cubic (BCC)
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
If you need any service, please contact us
