Lithium zirconate sputtering targets are ceramic materials commonly used for thin film deposition via sputtering techniques. Li2ZrO3 is a lithium-based complex oxide known for its excellent chemical stability, high thermal resistance, and good ionic conductivity.
We offer customizable high purity lithium zirconate sputtering targets in various purities, sizes, shapes, and fabrication methods to meet specific requirements. Any questions, con’t hesitate to contact us.
High Purity: ≥99.9%
High Density
Monoclinic Phase Stability
Custom Dimensions: Circular, rectangular, or other-shaped targets available
Bonds and Backings: Optional metal backing plates and target bonding service
Thin-Film Lithium-Ion Batteries : As a stable component in solid-state electrolyte layers or protective coatings.
Electrochemical Sensors: For gas detection and ion-selective devices due to its good ionic conductivity.
Tritium Breeding Materials in Nuclear Fusion: Used in breeding blankets thanks to its lithium content and high-temperature stability.
Hydrogen Isotope Storage: Serves as a ceramic matrix for safe and reversible hydrogen isotope absorption.
Q1: What types of thin films is Lithium Zirconate sputtering target mainly used for?
A1: This target is mainly used for preparing functional lithium zirconate oxide thin films, widely applied in solid-state electrolytes, lithium battery materials, and high-temperature ceramic thin film research.
Q2: What are the characteristics of Lithium Zirconate material in thin film deposition?
A2: This material has good chemical and structural stability, enabling the formation of uniform and controllable thin film structures during sputtering, ensuring stable film performance.
Q3: Which deposition processes is this sputtering target suitable for?
A3: Lithium Zirconate sputtering targets can be used in PVD processes such as RF sputtering and DC sputtering, and are suitable for laboratory and pilot-scale equipment.
Q4: What precautions should be taken when using and storing Lithium Zirconate sputtering targets?
A4: It is recommended to operate and store in a dry, sealed environment, avoiding prolonged exposure to air to ensure the stability of the target during the deposition process and the quality of the thin film.
Each batch of Li2ZrO3 is supplied with a Certificate of Analysis (COA) and Material Safety Data Sheet (MSDS).
Third-party analysis can be provided on request.
Optional characterization reports (XRD, SEM, ICP) upon request.
Molecular Formula: Li₂ZrO₃
Molecular Weight: 153.10 g/mol
Appearance: Dense white solid target material
Density: 4.15 g/cm³
Melting Point: 1705 °C
Crystal Structure: Monoclinic
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
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