Zirconium Titanium Alloy sputtering targets are lightweight, highly stable functional alloy targets with excellent film adhesion and corrosion resistance, widely used in optoelectronic thin films, hard coatings, and semiconductor-related deposition processes.
We can produce ZrTi sputtering targets of different purity grades, composition ratios, and various sizes and shapes (round, square, tubular, and ring targets), supporting customized resistivity, density, and microstructure stability. We offer a full range of processing capabilities from small experimental targets to large industrial coating targets, and can fully match to your equipment model. Please feel free to contact us.
Customizable composition ratios
High density and good film uniformity
Low impurity content
Excellent corrosion resistance
Low particle sputtering and low-defect films
Strong stability under vacuum
Multiple assembly options available
Support for long and rotating target customization
Optoelectronic Thin Film Preparation: Used for optical coating, modulation thin films, and reflective film deposition.
Hard protective coatings: Used for thin film reinforcement in cutting tools, molds, and wear-resistant parts.
Semiconductor and electronics fields: Used for the formation of functional films, barrier layers, and electrode protective layers.
Scientific research and development applications: Used in universities and research institutions for research on novel thin film materials.
Q1: What is the typical purity of ZrTi sputtering targets?
A1: The standard purity is 99.5%. Higher purity levels can be achieved for thin film applications, and the content of impurities such as oxygen, carbon, and nitrogen can be controlled according to process requirements.
Q2: How are the targets packaged? Are they suitable for long-distance transportation?
A2: The targets are packaged using a three-layer structure: foam cushioning + vacuum sealing + shockproof wooden crate, ensuring no damage during international transportation. Suitable for air and sea freight.
Q3: Do the targets require special storage? Will they oxidize if stored for a long time?
A3: It is recommended to store in a dry, airtight environment. For long-term storage, they can be placed in an inert protective bag. The targets themselves are stable, but avoiding humid environments can extend their service life.
Q4: Do you provide installation support or coating parameter suggestions?
A4: We can provide a matching target structure based on the equipment model and offer initial process suggestions (such as power, pre-sputtering time, etc.) to help you quickly reach stable production.
Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Third-party testing reports available upon request
We possess mature ZrTi sputtering target production technology, enabling us to achieve high density, low impurities, and high consistency target quality; providing stable and reliable film deposition performance for optical coatings, hard coatings, and semiconductor thin films.
We support customized formulations, sizing, rapid delivery, technical consultation, and long-term supply guarantees, and have a strict quality system and comprehensive testing methods to provide continuous and reliable products and services to global customers. Our materials are widely used in research institutions, coating plants, and high-end manufacturing enterprises, making us a reliable partner for thin film preparation.
Molecular formula: ZrTi
Appearance: Dense, silvery-gray metallic target with a smooth surface
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
If you need any service, please contact us