Zirconium Oxide Rotary Sputtering Target is a high-density ceramic target designed for uniform, large-area thin-film deposition in advanced optical and electronic applications. Ideal for producing wear-resistant, insulating, and high-performance thin films with consistent coverage.
We manufacture ZrOx rotary targets with precise control over density, composition, and surface finish. Our production can accommodate various diameters, lengths, and rotation-compatible designs to suit your deposition equipment. Contact us.
High density and chemical stability
Uniform ceramic microstructure
Smooth and defect-free surface
Excellent thermal and mechanical performance
Stable thin-film deposition characteristics
Suitable for large-area coating systems
Low contamination and high purity
Compatible with DC and RF sputtering
Durable under continuous rotation deposition
Customizable size and geometry
Optical Coatings: Used for transparent, wear-resistant layers on lenses and displays.
Semiconductor Devices: Applied for dielectric and barrier thin films in microelectronics.
Protective Films: Ideal for corrosion- and wear-resistant coatings in industrial equipment.
R&D Applications: Suitable for laboratory studies in functional oxides and advanced ceramics.
Q1: How is the ZrOx rotary target packaged for transport?
A1: Targets are vacuum-sealed and secured in reinforced crates with protective foam to prevent damage and contamination during shipping.
Q2: Can the rotary target’s dimensions or composition be customized?
A2: Yes, we offer various diameters, lengths, and oxide compositions tailored to your deposition equipment and process requirements.
Q3: What storage conditions are recommended for ZrOx rotary targets?
A3: Store in a dry, clean, and stable environment, avoiding moisture, dust, and corrosive chemicals to maintain target integrity.
Q4: What purity and performance assurances are provided?
A4: Our ZrOx rotary targets maintain high chemical purity, uniform density, and smooth surface quality to ensure consistent thin-film deposition results.
Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Third-party testing reports available upon request
We deliver high-quality ZrOx rotary sputtering targets with precise density, smooth surfaces, and consistent deposition performance. With technical consultation, customizable designs, and reliable delivery, we help customers achieve high-quality thin films for optical, electronic, and protective applications.
Molecular Formula: ZrOₓ (X can be customized)
Appearance: White to light gray dense ceramic rotating target with a smooth surface
Crystal Structure: Monoclinic/tetragonal/cubic phases available, high stability
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
If you need any service, please contact us
