Zirconium boride sputtering targets are engineering ceramic materials designed for high-performance thin film deposition in harsh environments. ZrB₂ targets offer high purity, excellent electrical conductivity, and superior thermal stability, enabling the preparation of dense, uniform, and high-hardness coatings across a wide range of applications.
Our ZrB2 sputtering targets are manufactured using advanced hot-pressing or SPS bonding processes, ensuring excellent mechanical strength, low porosity, and reliable deposition performance. We offer a variety of custom shapes, including planar, rotating, bonded, and backing plate types, to meet the needs of R&D and industrial-scale coating systems.
High purity
Low porosity and high density
High thermal and chemical stability
Suitable for high-power sputtering and extreme thin film preparation conditions
Excellent electrical conductivity
Fully customizable dimensions
Customizable structure and bonding methods
Protective Hard Coatings：Used in cutting tools, wear-resistant components, and aerospace parts.
Functional Ceramic Films：Suitable for high-temperature, corrosion-resistant, and conductive ceramic layers.
Microelectronics & Sensors：For high-conductivity ceramic features and barrier layers.
Optical Thin Films：Enables durable, high-stability coatings for infrared and high-energy optical systems.
Q1: What shapes and sizes of ZrB2 sputtering targets do you offer?
A1: We offer planar disks, flat plates, stepped targets, and rotating tube targets, which can be bonded to copper or aluminum backing plates.
Q2: Are ZrB2 targets suitable for high-power sputtering?
A2: Yes. Their high thermal conductivity and excellent ceramic strength enable stable operation at high sputtering power.
Q3: How should ZrB2 sputtering targets be stored?
A3: Store in a dry, sealed environment. Avoid moisture and temperature fluctuations to prevent surface oxidation.
Q4: Can purity or density be customized?
A4: Yes, we can provide adjustable purity grades, density optimization, and customized sintering processes according to performance requirements.
Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Third-party testing reports are available upon request.
Stable Film Quality: Low particle formation and high-density target structure ensure uniform deposition.
Customized Production: Customized production is available to suit different coating equipment and application scenarios.
Engineering Support: Assistance with sputtering parameters, bonding methods, and coating optimization.
Strict Quality Control: Each target undergoes purity, density, uniformity, and microstructure testing.
Reliable Supply and Fast Delivery: A stable material supply chain and efficient production capabilities.
Molecular Formula: ZrB₂
Molecular Weight: 112.84 g/mol
Appearance: Dark gray to black dense ceramic target
Density: Approx. 6.0–6.1 g/cm³
Melting Point: Approx. 3,250 °C
Boiling Point: Approx. 3,800 °C
Crystal Structure: Hexagonal structure (AlB₂ type), with a highly stable lattice arrangement
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
If you need any service, please contact us
