| Product ID | Formula | Purity | Dimension | Inquiry |
|---|---|---|---|---|
| 741400ST001 | WSi2 | 99.5% | Ø 50.8 mm x 3.175 mm | Inquire |
| 741400ST002 | WSi2 | 99.5% | Ø 76.2 mm x 3.175 mm | Inquire |
| 741400ST003 | WSi2 | 99.5% | Ø 76.2 mm x 6.35 mm | Inquire |
| 741400ST004 | WSi2 | 99.5% | Ø 101.6 mm x 3.175 mm | Inquire |
| 741400ST005 | WSi2 | 99.5% | Ø 101.6 mm x 6.35 mm | Inquire |
Tungsten Silicide sputtering target is a composite target material designed for high-performance thin film deposition applications. It combines the high melting point of tungsten with the chemical stability of silicon, has excellent thermal stability, resistivity control ability and good film uniformity, and is very suitable for microelectronic devices, resistive films and hard protective films.
We can provide Tungsten Silicide sputtering targets of different sizes and shapes, including round, rectangular and various composite structures, and support customized services to meet various PVD process requirements. If you have any questions during use, please feel free to contact us, we will provide comprehensive technical support and after-sales service.
Purity: 99.5%
Dense structure ensures stable sputtering process and uniform film
High hardness and strong corrosion resistance, suitable for harsh environments
Customized size, shape, hole position or backplane design according to customer needs
Good resistivity control, suitable for thin film resistors and barrier layers
Microelectronic devices: As a barrier layer or interlayer material to prevent metal diffusion and improve device reliability
Thin film resistors: Used for precision resistor films with stable resistivity and good temperature coefficient
Hard coating: Provides wear and corrosion protection for surfaces such as tools and molds
MEMS/sensors: Used as functional films to improve device performance and life
We provide Material Safety Data Sheet (MSDS), Certificate of Analysis (COA) and related test reports for each batch of WSi₂ sputtering targets, and support customer-specified third-party testing requirements to ensure that products meet quality and safety standards.
Molecular formula: WSi₂
Molecular weight: 240.01 g/mol
Appearance: Gray-black metallic luster ceramic target, dense and flat surface
Density: about 9.3 g/cm³ (close to theoretical density)
Melting point: about 2,160 °C
Crystal structure: tetragonal system
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
If you need any service, please contact us
