Titanium Tantalum Zirconium Hafnium Aluminum alloy sputtering targets are multi-component, high-performance alloy targets specifically engineered for depositing advanced films with exceptional comprehensive properties. This material combines the outstanding characteristics of multiple high-melting-point metals, making it suitable for cutting-edge technological fields demanding extreme high-temperature strength, corrosion resistance, and thermal stability.
We offer high-purity pentavalent alloy targets in multiple composition ratios, supporting customized composition tuning, dimensional specifications, and backing plate bonding solutions to meet specific application requirements.
Extreme high-temperature stability
Superior corrosion and oxidation resistance
Outstanding high-temperature strength and toughness
Precise composition control
Uniform and dense sputtered film deposition
Aerospace High-Temperature Component Protection: Used for protective coatings on critical hot-end components like aircraft engine blades and combustion chambers, significantly enhancing resistance to high-temperature oxidation and thermal corrosion.
Nuclear Industry Special Environment Applications: Provides outstanding resistance to radiation damage and corrosion in extreme environments such as nuclear reactor cladding materials and nuclear fuel assemblies.
Ultra-High Temperature Processes in Semiconductors: Suitable for ultra-high temperature electrodes or barrier layers in third-generation semiconductor (e.g., SiC, GaN) device manufacturing, ensuring device reliability under elevated temperatures.
Wear-Resistant Coatings for High-End Tools: Used for surface strengthening of high-speed cutting tools and precision molds, significantly extending tool life under high-temperature, high-speed operating conditions.
Q1: What are the primary advantages of this five-component alloy target material?
A1: It achieves exceptional comprehensive properties unattainable by single metals through synergistic effects of multiple high-melting-point metals, particularly excelling in high-temperature strength, corrosion resistance, and thermal stability.
Q2: How is compositional uniformity ensured in multi-component alloys?
A2: We employ vacuum arc melting combined with multiple re-melting cycles and homogenization heat treatment to guarantee high macro- and micro-structural uniformity.
Q3: What are the challenges in preparing this target material?
A3: The difficulties lie in melting and composition control of multiple high-melting-point, highly reactive metals, as well as achieving high-density, defect-free target ingots. We possess specialized melting equipment and process technologies to overcome these challenges.
Q4: What standard specifications are available?
A4: We offer circular and rectangular targets in various dimensions and can customize non-standard sizes per equipment requirements.
Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Size Inspection Report
Third-party testing reports available upon request
We possess deep technical expertise in multi-element high-melting-point alloy targets, with full-chain independent production capabilities spanning raw material purification, vacuum melting, thermal processing, and precision machining. Beyond supplying high-quality target materials, we provide composition design recommendations and process optimization solutions based on material genetic engineering. By choosing us, you gain a professional partner dedicated to solving material challenges in extreme operating conditions.
Molecular formula: TiTaZrHfAl
Appearance: Silver-gray to metallic luster target material
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
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