Titanium Suboxide sputtering targets are high-purity, controlled-oxygen-content titanium oxide (TiOx) ceramic sputtering targets specifically designed for depositing non-stoichiometric titanium oxide films with specific optoelectronic and functional properties. They are widely used in fields such as photocatalysis, smart windows, photovoltaic cells, and biomedical coatings, serving as a key material for achieving multifunctional surface modifications.
We precisely control the oxygen vacancy concentration and crystalline phase of the target material according to your specific film performance requirements, providing customized TiOx sputtering targets for R&D and production. We sincerely invite you to discuss collaboration opportunities.
Precise and controllable oxygen content
High purity and excellent density
Stable and consistent sputtering performance
Superior photocatalytic activity and electrochromic properties
Multiple crystalline phase options available (e.g., anatase, rutile)
Photocatalysis and Environmental Purification: Used to fabricate high-efficiency photocatalytic films coated on self-cleaning glass and air purification equipment surfaces, effectively decomposing organic pollutants while providing antibacterial functionality.
Electrochromic Smart Windows: As a key layer material, sputtered TiOx films reversibly alter color and transmittance under applied voltage, enabling dynamic shading and energy-saving light control.
Solar Cells and Photovoltaic Devices: Serves as electrode material for dye-sensitized solar cells or as the electron transport layer in perovskite cells, enhancing photovoltaic conversion efficiency and device stability.
Biocompatible Coatings: Depositing TiOx films on medical implants (e.g., artificial joints, dental implants) significantly enhances their biocompatibility, corrosion resistance, and osseointegration.
Q1: What does “x” represent in TiOx target materials? How does it affect film properties?
A1: “x” denotes the non-stoichiometric ratio of oxygen to titanium (typically between 1.5–2.0). Precise control of the “x” value directly determines the oxygen vacancy concentration in the film, significantly influencing its conductivity, light absorption characteristics, catalytic activity, and electrochromic response speed.
Q2: How should one select between rutile and anatase phase TiOx targets?
A2: Anatase typically exhibits higher photocatalytic activity, making it suitable for self-cleaning and purification coatings. Rutile offers greater structural stability and higher refractive index, making it preferable for optical protective films and wear-resistant coatings. We can recommend the appropriate phase based on your application objectives.
Q3: How stable is this target material during sputtering?
A3: Our advanced sintering process ensures highly uniform microstructure, maintaining stable deposition rates and consistent film composition during prolonged DC magnetron sputtering or RF sputtering while preventing abnormal discharges.
Q4: Do you support small-batch R&D customization?
A4: We strongly support R&D innovation. We offer small-batch custom targets in small sizes, with specific oxygen content and crystalline phases, along with detailed process parameter recommendations to accelerate your development.
Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Size Inspection Report
Third-party testing reports available upon request
We specialize in functional oxide ceramic targets, deeply understanding how the oxygen stoichiometry in TiOx materials critically determines final film performance. Through precise doping and sintering techniques, we deliver custom-tailored TiOx targets with distinct properties—not generic solutions.
Molecular formula: TiOₓ (x can be customized)
Appearance: Black to gray target material
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
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