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Niobium oxide rotary targets are spinning sputtering targets based on niobium oxide ceramics. They possess high stability, excellent optical properties, and highly controllable stoichiometry, and are commonly used in the deposition of transparent thin films, electrically functional films, and highly corrosion-resistant coatings. They are primarily used to prepare transparent conductive films, optical interference films, barrier layers, and functional protective films.
We can produce niobium oxide rotary targets with different formulations (NbO, NbO₂, Nb₂O₅, etc.), supporting customization of various diameters, lengths, and wall thicknesses. These targets exhibit high uniformity, high density, and excellent mechanical strength. The targets can be paired with high thermal conductivity backplanes and employ diffusion bonding or high-vacuum bonding processes, making them suitable for medium- to long-life spinning sputtering systems. Contact us for NbOx rotary target chemical formulations.
Stable oxide stoichiometry
High density and excellent mechanical strength
Compatible with mainstream rotating magnetron sputtering equipment
Supports customization of multiple NbOx phases
Long lifespan and uniform etching performance
High backplate strength and excellent heat dissipation
Target bonding service
Low particle ratio, suitable for high-requirement thin films
Transparent optical thin films: Used to prepare stable and high-refractive-index optical interference layers.
Electronic device barrier films: Used as anti-diffusion or electrical modulation materials in component structures.
Decorative and protective coatings: Used to form wear-resistant, corrosion-resistant, and highly adhesive films.
Solar and photovoltaic industry thin films: Used for optical modulation, filter film, or functional layer structure fabrication.
Q1: What packaging method is typically used for NbOx tube targets?
A1: Each tube target is packaged in multi-layer shockproof packaging, sealed in a clean bag, and placed in a dedicated reinforced box to ensure that the structure does not deform and the surface is not contaminated during transportation.
Q2: What processing technologies are available for niobium oxide rotary targets?
A2: We offer precision grinding, end-face machining, backplate welding, surface polishing, and customized sintering processes for targets in different oxidation states.
Q3: How should targets be stored correctly?
A3: It is recommended to store them in a dry, room-temperature environment, away from light and moisture, to maintain a stable oxidation state and surface cleanliness.
Q4: What purity level can NbOx targets achieve?
A4: We can provide niobium oxide raw materials with a purity of ≥ 99.9%, and can provide stoichiometric control reports for different proportions of NbO, NbO₂, and Nb₂O₅ upon request.
Each batch is provided with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Third-party testing reports are available upon request.
Specializing in refractory metal oxide sputtering targets and tube targets
Supporting a full-chain service from R&D to mass production
Controllable formulations and stable structures, suitable for high-consistency thin film preparation
Flexible customization available for various sizes, phases, and backplane structures
Complete set of testing equipment ensures transparent and traceable target quality
Extensive global shipping experience, with safe and reliable packaging
Professional technical team provides sputtering parameter advice and material selection guidance
Chemical formula: NbOₓ (x ≈ 2–2.5)
Appearance: Grayish-black metallic tube target
Crystal structure: Orthorhombic (mainly T-Nb₂O₅)
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
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