Lithium Titanate sputtering targets are advanced ceramic materials, with a stable monoclinic structure and excellent thermal and chemical resistance, Li2TiO3 targets provide a reliable source of lithium and titanium during physical vapor deposition (PVD) processes.
Our high-purity lithium Titanate sputtering targets are manufactured using high-quality raw materials and precision sintering techniques to ensure high density, low porosity, and consistent composition. We offer comprehensive after-sales support—please feel free to contact us if you have any questions.
Purity: ≥99.9%
High Density
Monoclinic Phase Stability
Custom Dimensions: Circular, rectangular, or ring-shaped targets available
Bonds and Backings: Optional metal backing plates and target bonding service
Lithium-Ion Battery Coatings: For advanced anode or solid-electrolyte interphases
Solid-State Devices: Thin films in solid-state lithium-ion conductors
Fusion Energy Research: Thin-film coatings for tritium breeding applications
Functional Oxide Layers: Deposition of dielectric or ionic conductive layers
Q1: What types of thin films are Lithium Titanate sputtering targets mainly used for?
A1: This target is mainly used for preparing functional lithium titanium oxide thin films, commonly used in research related to lithium-ion battery anode materials, functional oxide thin films, and solid-state electrolytes.
Q2: What are the characteristics of Lithium Titanate material in thin film deposition?
A2: This material has good chemical and structural stability, enabling the formation of uniform, dense, and stable thin films during sputtering.
Q3: Which deposition processes are suitable for this sputtering target?
A3: Lithium Titanate sputtering targets are suitable for PVD processes such as RF sputtering and DC sputtering, and are compatible with both laboratory and pilot-scale equipment.
Q4: What precautions should be taken when using and storing Lithium Titanate sputtering targets?
A4: It is recommended to operate and store them in a dry, sealed environment, avoiding prolonged exposure to air to ensure the stability of the target during the deposition process and the quality of the thin film.
Each batch of Li2TiO3 is supplied with a Certificate of Analysis (COA) and Material Safety Data Sheet (MSDS).
Third-party elemental purity and phase composition analysis can be provided on request.
Optional: Density report, bonding spec sheet, XRD confirmation of phase.
Molecular Formula: Li₂TiO₃
Molecular Weight: 109.75 g/mol
Appearance: Dense white solid target material
Density: 3.43 g/cm³
Melting Point: 1520 – 1530 °C
Crystal Structure: Monoclinic
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
If you need any service, please contact us
