Iron zirconium Alloy sputtering targets are key alloy targets used in physical vapor deposition (PVD) processes. They are primarily used to deposit high-performance ferrous zirconium alloy thin films on various substrates via magnetron sputtering. These films, with their excellent adhesion strength, superior wear resistance, and good high-temperature stability, have important applications in tool coatings, semiconductors, and precision optics.
We offer high-purity, high-density Iron zirconium Alloy sputtering targets. We can customize products of different sizes and shapes to meet your equipment and process requirements, ensuring uniform and consistent film deposition. Please contact us for detailed product specifications.
High-purity alloy composition with extremely low impurity content
Dense and uniform microstructure
Excellent wear and corrosion resistance
Superior film adhesion
Customizable size and shape
Stable sputtering performance and film quality
Wear and corrosion resistant protective coatings:Iron zirconium Alloy films, used as surface coatings for tools, molds, and critical components, significantly improve hardness and enhance resistance to abrasive and corrosive environments, thereby greatly extending service life.
Microelectronics and semiconductors: In semiconductor manufacturing, this film can serve as a special metallization layer or barrier layer, applied to transistor electrodes or integrated circuit interconnects, providing stable electrical performance and reliable diffusion blocking.
Advanced optical devices: Iron zirconium Alloy films deposited on the surfaces of optical lenses, mirrors, and other components effectively improve the transmittance, reflectivity, and environmental durability of optical systems, ensuring long-term stability of optical performance.
Aerospace components: Due to its excellent high-temperature stability and strength, ferrozirconium alloy films are suitable for surface strengthening of high-temperature components in aero-engines or aircraft structural materials, meeting performance requirements in extreme environments.
Q1: What is the purity of the iron-zirconium alloy sputtering target? What are the main specifications?
A1: We offer high-purity products. Specific purity grades and key element ratios can be customized according to application requirements. Product specifications cover standard and non-standard sizes, and shapes include planar and rotating targets.
Q2: Can I customize a target of a special size for my coating equipment? What is the process?
A2: Customization is supported. You only need to provide the equipment model, target film performance, or specific drawing requirements. Our technical team will evaluate and provide you with a matching solution, quotation, and production cycle.
Q3: How do you ensure the compositional uniformity and batch stability of the alloy sputtering target?
A3: We ensure the consistency of chemical composition and microstructure of each batch of targets through strict raw material screening, advanced melting and forming processes (such as powder metallurgy or hot isostatic pressing), and precise testing throughout the process.
Q4: When using alloy sputtering targets, how can the sputtering process be optimized to obtain an ideal thin film?
A4: We recommend referring to our process guidelines, focusing on key parameters such as sputtering power, gas pressure, and substrate bias. Appropriately increasing the sputtering power usually helps obtain denser, higher-performance films.
Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Size Inspection Report
Third-party testing reports available upon request
We are not only a sputtering target manufacturer, but also your technical partner for materials solutions. We deeply understand the application requirements of alloy thin films and ensure reliable performance and transparent data for every sputtering target delivered through end-to-end control from composition design to precision manufacturing. We support your innovation and production with professional products and services.
Molecular formula: FeZr
Appearance: Silver-gray
Crystal structure: Body-centered cubic (BCC)
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
If you need any service, please contact us