Indium Tin Oxide Rotary target (ITO) are high-performance transparent conductive oxide targets, primarily composed of indium oxide (In2O3) and tin oxide (SnO2). They are fabricated into highly dense cylindrical targets using hot isostatic pressing (HIP) or sintering processes and then combined with titanium or stainless steel tubes to form a rotating structure. ITO thin films are widely used in flat panel displays (LCD, OLED), touchscreens, energy-saving Low-E architectural glass, thin-film solar cells, and optoelectronic devices, making them one of the most important transparent conductive film materials in the modern optoelectronic industry.
Our ITO Rotary targets have advantages such as high utilization rate, good sputtering stability, and excellent film uniformity. Their excellent electrical conductivity and optical transmittance make them the most important transparent conductive films in the modern optoelectronic industry. We have comprehensive after-sales service. Please contact us for information.
High-performance transparent conductive material
Excellent target utilization
Stable sputtering and uniform film deposition
Superior film performance
Wide range of applications
Comprehensive bonding services
Customizable solutions
Display and Touch Technology:Used in LCD, OLED, and touch panel manufacturing as a transparent conductive electrode, providing excellent electrical conductivity and optical transmittance.
Photovoltaic Devices:Serves as a transparent electrode layer in thin-film solar cells such as CIGS, CdTe, and perovskite types, improving light transmission and conversion efficiency.
Optoelectronic and Research Applications:Utilized in photodetectors, electrochromic devices, and R&D coating systems for developing advanced transparent conductive films.
Years of expertise in the industry
Experience in processing high-purity, high-quality materials
Comprehensive bonding solutions
Stable thin film performance
Professional customization capabilities
Global service and support
Q1: What is the composition of the ITO rotary target?
A1: The ITO target is composed of indium oxide (In₂O₃) and tin oxide (SnO₂), typically with a 90:10 weight ratio.
Q2: What backing tube materials and bonding methods are available?
A2: Titanium and stainless steel tubes are available. Bonding options include explosion bonding, diffusion bonding, and HIP bonding for excellent mechanical and thermal performance.
Q3: What sputtering conditions are recommended for ITO targets?
A3: Typical deposition uses DC or mid-frequency magnetron sputtering with controlled oxygen partial pressure to balance conductivity and transparency.
Q4: What is the expected lifetime or utilization rate of a rotary target?
A4: Rotatable targets can achieve 75–90% utilization depending on system design, significantly higher than planar targets (30–40%).
Q5: Can the target be customized for specific sputtering systems?
A5: Yes. Dimensions, composition, tube materials, and bonding types can all be customized according to the customer’s equipment and process needs.
Each batch of products is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Third-party testing reports are available upon request to meet industrial and research standards.
Molecular Formula: In₂O₃–SnO₂
Appearance: Off-white or silver-gray, dense rotating target
Melting Point: ~1900°C
Boiling Point: ~2000°C
Crystal Structure: Cubic (In₂O₃ as the primary phase)
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
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