Aluminum Titanium Silicon Alloy Sputtering Target is a high-performance composite target designed for advanced thin-film deposition processes. Combining aluminum’s lightweight conductivity with titanium’s strength and corrosion resistance and silicon’s semiconductor properties, this alloy target is ideal for applications requiring durable, electrically conductive, and thermally stable films.
Produced from ultra-high-purity raw materials through controlled alloying and densification processes, our aluminum titanium silicon alloy sputtering targets offer consistent composition, high density, and low impurity levels, ensuring superior sputtering performance and film quality. We also offer comprehensive after-sales support—please feel free to contact us if you have any questions.
Purity: ≥99.9%
Customizable AlTiSi compositions for specific application needs
High density and purity for reliable sputtering
Excellent mechanical strength, corrosion resistance, and thermal stability
Enhanced electrical and semiconductor properties
Uniform microstructure for consistent film uniformity and adhesion
Available in various shapes and sizes (circular, rectangular, custom)
Semiconductor and microelectronics thin films
Protective and wear-resistant coatings
Aerospace and automotive advanced coatings
Electronic packaging and interconnects
Optical and sensor device coatings
Certificate of Analysis (COA)
Material Safety Data Sheet (MSDS)
Third-party testing available upon request
Chemical Formula: AlTiSi
Appearance: Silver gray
Density: Approx. 2.7–4.5 g/cm³
Melting Point: Approx. 600–1400 °C
Magnetic Properties: Non-magnetic
Corrosion Resistance: Excellent, enhanced by titanium and silicon
Chemical Reactivity: Stable under sputtering conditions
Not classified as hazardous
Inner packaging: Vacuum-sealed bag to protect against contamination and moisture.
Outer packaging: Carton or wooden box, depending on size and weight.
Fragile targets: Special protective packaging is used to ensure safe transport.
If you need any service, please contact us
