| Product ID | Formula | Purity | Dimension | Inquiry |
|---|---|---|---|---|
| 3008130800RT001 | ZnO-Al2O3 | 99.9% | ID125mm x OD133mm x 850mm | Inquire |
| 3008130800RT002 | ZnO-Al2O3 | 99.95% | OD332 mm x ID147 mm x 2mm | Inquire |
| 3008130800RT003 | ZnO-Al2O3 | 99.99% | OD32 mm x ID23 mm x 150mm | Inquire |
Alumina-doped zinc oxide rotary targets are transparent conductive oxide targets designed for large-area continuous deposition processes, primarily used in high-efficiency, long-cycle thin-film deposition production lines.
We offer complete rotating target solutions in various lengths, diameters, and doping ratios, and support technical services tailored to your equipment. Please cotact us for detailed information.
High target utilization
Stable and continuous deposition process
Uniform composition distribution
Suitable for long-term operation
Good film consistency
Suitable for automated production lines
Large-area transparent conductive thin-film production: Suitable for continuous deposition lines, maintaining stable electrical and optical properties of the film under long-term operation.
Display panel and touch glass manufacturing: Used for electrode deposition in large-size displays and touch panels, applications requiring high film uniformity and repeatability.
Thin-film solar modules: As a conductive layer deposition material, it helps improve module consistency and production efficiency.
Industrial functional thin-film deposition: Suitable for industrial-grade thin-film fabrication needs requiring high throughput and stable process windows.
Q1: What are the main advantages of rotating targets compared to planar targets?
A1: Rotating targets significantly improve target utilization and support longer continuous coating operations.
Q2: Does this rotating target require special equipment?
A2: It needs to be used with corresponding rotating target magnetron sputtering equipment. Specific interfaces can be customized according to the equipment.
Q3: Will the doping ratio affect the stability of continuous production?
A3: A reasonable doping design helps maintain discharge stability and film performance consistency.
Q4: How is the lifespan of the rotating target assessed?
A4: It is usually assessed comprehensively based on the target consumption rate, operating time, and film performance stability.
Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Third-party testing reports available upon request
We have accumulated mature experience in the preparation and application of transparent conductive oxide rotating targets, focusing on structural reliability, composition consistency, and equipment adaptability, providing stable support for our customers’ continuous production.
Molecular Formula: ZnO-Al2O3
Appearance: White, dense ceramic target, tubular structure, with a bright and uniform surface
Density: Approximately 5.60 g/cm³
Crystal Structure: Hexagonal Wurtzite (P6₃mc)
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
If you need any service, please contact us