| Product ID | Formula | Purity | Dimension | Inquiry |
|---|---|---|---|---|
| 3008130800RT001 | ZnO-Al2O3 | 99.9% | ID125mm x OD133mm x 850mm | Inquire |
| 3008130800RT002 | ZnO-Al2O3 | 99.95% | OD332 mm x ID147 mm x 2mm | Inquire |
| 3008130800RT003 | ZnO-Al2O3 | 99.99% | OD32 mm x ID23 mm x 150mm | Inquire |
Alumina-doped Zinc Oxide rotary targets are primarily used in large-area deposition processes, suitable for the continuous and stable fabrication of transparent conductive functional thin films.
We offer rotary targets in various sizes and structures. Please contact us directly for specification confirmation or technical support.
High doping density
Uniform doping
Stable discharge
Consistent target consumption
Suitable for long-term operation
Good conductivity
Can be bonded to backplanes
Large-area transparent conductive film deposition: Suitable for continuous deposition equipment in architectural glass, display panels, and other applications requiring high film uniformity.
Industrial-grade magnetron sputtering production lines: The rotating structure helps improve target utilization, meeting the needs of high-capacity, long-cycle operation.
Photovoltaics and functional glass: Can be used to prepare functional thin films that balance transmittance and conductivity, improving overall device efficiency.
R&D and pilot-scale production: Suitable for transitioning from experimental parameters to production conditions, with a stable process window and good repeatability.
Q1: What are the advantages of rotating targets compared to planar targets?
A1: The rotating structure significantly improves target utilization and contributes to film thickness uniformity and discharge stability.
Q2: Which sputtering methods is this target suitable for?
A2: Primarily used in DC or medium-frequency magnetron sputtering equipment, suitable for continuous production lines.
Q3: Is the target prone to cracking during use?
A3: By optimizing the sintering process and structural design, thermal stress can be effectively reduced, improving reliability.
Q4: Does it support customized sizes and interfaces?
A4: Length, diameter, and connection structure can be customized according to equipment requirements for easy direct installation and use.
Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Third-party testing reports available upon request
We have mature experience in rotating target manufacturing and quality control, and can continuously provide stable material solutions suitable for mass production processes.
Molecular Formula: ZnO-Al2O3
Appearance: White, dense ceramic target, tubular structure, with a bright and uniform surface
Density: Approximately 5.60 g/cm³
Crystal Structure: Hexagonal Wurtzite (P6₃mc)
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
If you need any service, please contact us
