Lithium Lanthanum Zirconium Oxide sputtering targets are ceramic targets designed for thin-film deposition of LLZO solid electrolyte layers. Known for high lithium-ion conductivity, excellent thermal and chemical stability, LLZO targets are widely used in research and development of all-solid-state lithium batteries, microbattery thin films, and advanced electrochemical materials.
Lithium Lanthanum Zirconium Oxide sputtering targets are manufactured with controlled stoichiometry and dense ceramic structure to ensure uniform sputtering rates, reproducible thin-film composition, and stable ionic conductivity. They are suitable for RF and magnetron sputtering systems used in thin-film solid electrolyte research.
High lithium-ion conductivity in deposited thin films
Dense ceramic structure for uniform and stable sputtering
Controlled stoichiometry for reproducible film properties
Compatible with RF and magnetron sputtering systems
Suitable for all-solid-state microbattery research
Good adhesion and compatibility with common substrates
Thin-Film Solid Electrolytes：Lithium Lanthanum Zirconium Oxide targets are used to deposit solid electrolyte layers in all-solid-state lithium microbatteries.
Microbattery and Energy Storage Research:Thin films from LLZO targets are applied in studies of ionic conductivity, interface engineering, and electrochemical stability.
Electrochemical Materials Research:Lithium Lanthanum Zirconium Oxidetargets support advanced research in solid-state electrolytes, composite electrodes, and functional thin-film materials.
Functional Coatings for Microbatteries:Used in the development of thin-film solid electrolyte coatings for energy storage and microelectronics applications.
Q1: Which sputtering methods are suitable for LLZO targets?
A1: LLZO targets are commonly used in RF and magnetron sputtering systems due to their ceramic and insulating nature.
Q2: Can LLZO thin films maintain lithium content during sputtering?
A2: Proper target design and optimized sputtering parameters minimize lithium loss and ensure uniform thin-film composition.
Q3: Are LLZO targets compatible with backing plates?
A3: Yes, bonding options can be provided based on target dimensions and sputtering system requirements.
Q4: Which substrates are compatible with LLZO thin films?
A4: Common substrates include silicon wafers, glass, sapphire, and other materials used in thin-film solid-state battery research.
Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Size Inspection Report
Third-party testing reports available upon request
Lithium Lanthanum Zirconium Oxide sputtering targets are frequently searched for thin-film solid electrolytes, all-solid-state battery development, and microbattery research. Their dense ceramic structure, controlled stoichiometry, and compatibility with RF/magnetron sputtering systems support strong search visibility and technical relevance.
Molecular formula: LiLaZrO₃
Molecular weight: 275.08 g/mol
Appearance: White or light gray dense solid target
Density: Approximately 5.6 g/cm³
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
If you need any service, please contact us
