Lithium Iron Phosphate sputtering targets are phosphate-based ceramic targets designed for thin-film deposition of LiFePO₄ functional layers. Owing to their olivine crystal structure, high thermal stability, and electrochemical reliability, these targets are primarily used in research and development of lithium-ion microbatteries, thin-film energy storage devices, and advanced materials studies.
Lithium Iron Phosphate sputtering targets are manufactured with controlled stoichiometry and dense microstructure to ensure stable and reproducible thin-film deposition. They are suitable for RF and magnetron sputtering processes, where precise film composition, thickness, and uniformity are required.
Olivine-type LiFePO₄ phase with high structural and thermal stability
Dense ceramic structure for consistent sputtering performance
Controlled stoichiometry supporting uniform thin-film composition
Compatible with RF and magnetron sputtering systems
Designed for microbattery and thin-film battery research
Good adhesion and compatibility with common substrates
Thin-Film Lithium-Ion Microbatteries：LiFePO4 sputtering targets are used to deposit cathode layers for microbattery and thin-film energy storage devices.
High-Stability Energy Storage Research：Thin films from LiFePO4 targets are used in studies of cycling stability, lithium-ion transport, and electrochemical performance in micro-scale energy systems.
Electrochemical & Materials Science Research：The targets support advanced research into phosphate-based cathode thin films, electrode optimization, and functional material studies.
Functional Phosphate Oxide Coatings：LiFePO4 targets are applied in the development of functional coatings for energy storage, electronic, and optical devices.
Q1: What sputtering methods are suitable for Lithium Iron Phosphate targets?
A1: LiFePO₄ targets are typically used in RF or magnetron sputtering systems due to their ceramic and insulating nature.
Q2: Can LiFePO₄ thin films maintain lithium content during sputtering?
A2: Proper target design and optimized sputtering parameters ensure minimal lithium loss and consistent thin-film composition.
Q3: Can these targets be bonded to backing plates?
A3: Yes, bonding options can be provided based on target size and sputtering system requirements.
Q4: What substrates are compatible with LiFePO₄ thin films?
A4: Common substrates include silicon wafers, glass, sapphire, and other substrates used in thin-film battery research.
Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Size Inspection Report
Third-party testing reports available upon request
Lithium Iron Phosphate sputtering targets are frequently searched for microbattery research, thin-film cathode deposition, and phosphate-based energy storage studies. Their dense ceramic structure, controlled stoichiometry, and compatibility with RF/magnetron sputtering systems support high search visibility and technical relevance.
Molecular Formula: LiFePO₄
Molecular Weight: 157.76 g/mol
Appearance: Grayish-black dense solid target material
Density: 3.60 g/cm³
Crystal Structure: Orthorhombic crystal system
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
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