Calcium silicate sputtering targets are circular or rectangular sheet materials manufactured from high-purity raw materials through specific forming and sintering processes. They are specifically designed for physical vapor deposition (PVD) processes. Under vacuum conditions, these targets undergo uniform sputtering deposition onto substrate surfaces when bombarded by high-energy particles, enabling the creation of calcium silicate films with specific functional properties.
We specialize in customizing and manufacturing calcium silicate sputtering targets in various specifications, high purity, and high density. We also offer complementary backing plate bonding services. For further details, please contact us immediately.
Guaranteed Ultra-High Purity
Exceptional Dense Structure
Superior Crystalline Properties
Flexible Custom Sizing
Outstanding Thermomechanical Stability
High Coating Uniformity
Optical Coating Field: Used to deposit anti-reflective coatings, protective films, or functional layers with specific refractive indices on eyeglass lenses, optical lenses, and display panels, effectively enhancing light transmittance, scratch resistance, and durability.
Microelectronics & Packaging: Serves as a thin-film material source for dielectric, insulating, or passivation layers in semiconductor device and integrated circuit manufacturing, delivering excellent electrical insulation and stability.
Biomedical Coatings: Forms calcium silicate bioactive coatings via sputtering on metal implants (e.g., artificial joints, bone pins), significantly promoting bone cell adhesion and growth to accelerate skeletal healing.
Functional Ceramic Films: Used to prepare ceramic films with high-temperature resistance, corrosion resistance, or specific catalytic properties on various substrates, applied in specialty sensors, fuel cells, or protective coatings.
Q1: What is the typical lifespan of a target material?
A1: Target lifespan directly depends on its utilization rate. Through optimized bonding processes and structural design, our targets typically achieve over 70% target utilization. The specific lifespan (measured by deposition time) is closely related to your process parameters such as power and current density.
Q2: Do you provide bonding services for targets and substrates?
A2: Yes, we offer professional bonding services. Calcium silicate targets can be reliably bonded to substrates made of materials like oxygen-free copper or molybdenum via brazing or conductive adhesive bonding, ensuring excellent thermal and electrical conductivity according to your requirements.
Q3: What primary functions or characteristics do films sputtered from CaSe targets exhibit?
A3: The deposited films primarily demonstrate semiconductor properties and unique optoelectronic characteristics. As a compound semiconductor film, its conductivity can be controlled through process parameters. This film may exhibit special transmittance or luminescent properties in the infrared optical band.
Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Size Inspection Report
Third-party testing reports available upon request
We are not merely target material manufacturers, but co-creators of your thin-film technology solutions. We deeply understand the stringent demands of sputtering processes on target performance, implementing rigorous control throughout the entire process—from raw material selection and forming/sintering to precision machining and testing. With our professional technical team, we provide comprehensive services ranging from material selection recommendations and bonding support to coating issue diagnostics.
Molecular Formula: CaSiO₃
Molecular Weight: 140.16 g/mol
Appearance: White solid target material
Density: 2.93 g/cm³
Melting Point: 1,530 °C
Crystal Structure: Monoclinic
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
If you need any service, please contact us