ULPMAT

Zirconium Oxide

Chemical Name:
Zirconium Oxide
Formula:
ZrO2
Product No.:
400800
CAS No.:
1314-23-4
EINECS No.:
215-227-2
Form:
Sputtering Target
HazMat:
Product ID Formula Purity Dimension Inquiry
400800ST001 ZrO2 99.95% (Zr + Hf) Ø 50.8 mm x 3.175 mm Inquire
400800ST002 ZrO2 99.95% (Zr + Hf) Ø 101.6 mm x 6.35 mm Inquire
Product ID
400800ST001
Formula
ZrO2
Purity
99.95% (Zr + Hf)
Dimension
Ø 50.8 mm x 3.175 mm
Product ID
400800ST002
Formula
ZrO2
Purity
99.95% (Zr + Hf)
Dimension
Ø 101.6 mm x 6.35 mm

Zirconium oxide Sputtering Target Overview

Zirconium oxide Sputtering Target is a high-purity ceramic target designed for stable, high-quality thin-film deposition in advanced electronic and optical applications. Ideal for producing durable, insulating, and wear-resistant thin films.

We manufacture ZrO2 sputtering targets in various shapes, sizes, and thicknesses, ensuring precise control over density, surface finish, and chemical composition. Our team offers custom dimensions, specialized target geometries, and technical support to optimize your thin-film deposition process. Contact us.

Product Highlights

High purity and chemical stability
Dense and defect-free ceramic structure
Excellent thermal and mechanical stability
Smooth surface with low roughness
Consistent thin-film deposition performance
High adhesion of deposited layers
Stable batch-to-batch quality
Compatible with RF and DC sputtering systems
Wear- and corrosion-resistant films
Custom shapes and sizes available

Applications of Zirconium oxide Sputtering Target

Optoelectronics: Used in transparent insulating layers and protective coatings.
Semiconductors: Applied for dielectric and barrier layers in microelectronic devices.
Protective Coatings: Ideal for wear- and corrosion-resistant thin films.
Research & Development: Suitable for laboratory studies in ceramics and functional oxide coatings.

FAQs

Q1: How is ZrO2 sputtering target packaged for shipment?
A1: Targets are vacuum-sealed, wrapped in protective anti-static film, and placed in reinforced cartons to prevent surface damage and contamination.

Q2: Can the target’s dimensions or surface finish be customized?
A2: Yes, we can produce ZrO2 targets in custom sizes, thicknesses, and surface finishes according to specific deposition requirements.

Q3: What storage conditions are recommended?
A3: Store in a dry, clean environment, away from moisture, dust, and corrosive chemicals to maintain target integrity and performance.

Q4: What purity and performance guarantees do you provide?
A4: Our ZrO2 targets maintain high chemical purity, dense ceramic structure, and uniform microstructure to ensure consistent thin-film deposition quality.

Reports

Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Third-party testing reports available upon request

Why Choose Us?

We provide premium ZrO2 sputtering targets with controlled density, smooth surfaces, and reliable performance for electronic, optical, and protective thin-film applications. With technical consultation, custom specifications, and fast delivery, we help customers achieve consistent, high-quality deposition results in both industrial and research environments.

Molecular Formula: ZrO₂
Molecular Weight: 123.22 g/mol
Appearance: White, dense ceramic target with a smooth surface
Density: Approximately 5.68 g/cm³
Crystal Structure: Monoclinic/tetragonal/cubic phases are available; high stability.

Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.

Outer Packaging: Cartons or wooden crates selected based on size and weight.

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