Zirconium metal rotary targets are engineered for high-efficiency continuous sputtering, offering superior film uniformity, long service life, and exceptional stability during high-throughput thin-film deposition. Manufactured from high-purity Zirconium, the rotary targets feature excellent density, optimized grain structure, and low impurity levels—ensuring consistent sputtering performance across large substrate areas.
We supply Zirconium rotary targets in various lengths, diameters, and compositions, fully customizable for different PVD coating systems. Professional bonding, machining, and surface finishing services are available. Our technical team is ready to support customers with equipment matching, process optimization, and troubleshooting.
High Purity
Optimized for Continuous High-Rate Sputtering
High Density & Homogeneous Microstructure
Low Impurity and Low Oxygen Levels
Custom Lengths, Diameters & Bonding Options
Ideal for Large-Area Coating & High-Volume Production
Architectural & Automotive Glass Coatings：For large-area films requiring superior uniformity and stable long-term sputtering.
Optical & Functional Coatings：Suitable for reflective, protective, and corrosion-resistant thin-film layers.
Semiconductors & Electronics：Used for barrier layers, conductive films, and specialized functional coatings.
Energy & Advanced Materials：Applied in hydrogen-related films, catalytic layers, and engineered surface materials.
Q1: What sizes are available for Zirconium rotary targets?
A1: We offer full customization including tube length, outer diameter, wall thickness, and bonding type to match various rotary sputtering systems.
Q2: Do Zirconium rotary targets support high-power deposition?
A2: Yes. With their high density and uniform grain structure, the targets perform reliably under high-power and long-duration sputtering conditions.
Q3: How should Zirconium rotary targets be stored and handled?
A3: Store in a clean, dry environment and keep the surface protected from moisture and contaminants. Handle carefully to prevent scratches or deformation.
Q4: Are bonding services provided?
A4: Yes. We offer professional bonding onto high-strength tubes, including stainless steel and other compatible materials.
Each batch is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Third-party testing reports are available upon request.
Superior Film Uniformity:Rotary design provides highly stable deposition for large-area coatings.
Advanced Manufacturing:High-density sintering and precision machining ensure excellent sputtering efficiency.
Customized Engineering Solutions:Dimensions, bonding methods, and purity levels can be tailored to your equipment and film requirements.
Comprehensive Quality Control:
Each target includes COA and MSDS, with third-party testing available on request.
Reliable Global Supply:Strong production capacity and inventory management ensure fast and uninterrupted delivery.
Molecular Formula: Zr
Atomic Weight: 91.22 g/mol
Appearance: Silver-gray metallic rotating target with a smooth outer surface and a uniform, dense structure.
Density: Approx. 6.52 g/cm³
Melting Point: Approx. 1,855 °C
Boiling Point: Approx. 4,377 °C
Crystal Structure: Hexagonal close-packed (hcp, α-Zr)
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
If you need any service, please contact us
