Aluminum Oxynitride Sputtering Target is a premium-quality ceramic target designed for advanced thin-film deposition applications. Combining excellent optical transparency, high hardness, and chemical stability, AlON targets enable the fabrication of durable, transparent coatings and functional films used in optics, electronics, and protective layers.
Our AlON sputtering targets are manufactured from high-purity raw materials with precise control over composition and microstructure, ensuring consistent sputtering rates, uniform film quality, and superior adhesion. We also offer comprehensive after-sales support—please feel free to contact us if you have any questions.
High Purity Aluminum Oxynitride: ≥99.9%
High density and uniform microstructure for stable sputtering
Excellent optical transparency and mechanical hardness
Superior chemical and thermal stability
Compatible with RF and DC sputtering systems
Custom sizes and shapes available
Transparent protective and anti-reflective coatings for optics and displays
Hard, wear-resistant coatings for industrial tools and components
Functional thin films in aerospace and defense applications
Electronic devices requiring transparent conductive or insulating layers
Laser optics and sensor technologies
Certificate of Analysis (COA)
Material Safety Data Sheet (MSDS)
Density and purity test reports
Optional third-party quality verification
Ultra-high purity raw materials for superior film quality
Precision manufacturing ensures high density and uniformity
Comprehensive technical support for target selection and sputtering process optimization
Global supply chain with reliable logistics and documentation support
Reliable aluminum oxynitride supplier, commitment to innovation and customer satisfaction
Chemical Formula: AlₓOᵧN𝓏
Appearance: Dense, polished ceramic disk or rectangular target
Density: Approximately 3.7–3.9 g/cm³
Melting Point: >2100 °C (decomposes)
Crystal Structure: Cubic spinel-type structure
Thermal Conductivity: Moderate to high, optimized for sputtering performance
Not classified as hazardous
Inner packaging: Vacuum-sealed bag to protect against contamination and moisture.
Outer packaging: Carton or wooden box, depending on size and weight.
Fragile targets: Special protective packaging is used to ensure safe transport.
If you need any service, please contact us
