Indium Tin Oxide Rotary target (ITO) are high-performance transparent conductive oxide targets, primarily composed of indium oxide (In2O3) and tin oxide (SnO2). They are fabricated into highly dense cylindrical targets using hot isostatic pressing (HIP) or sintering processes and then combined with titanium or stainless steel tubes to form a rotating structure. ITO thin films are widely used in flat panel displays (LCD, OLED), touchscreens, energy-saving Low-E architectural glass, thin-film solar cells, and optoelectronic devices, making them one of the most important transparent conductive film materials in the modern optoelectronic industry.
Our ITO Rotary targets have advantages such as high utilization rate, good sputtering stability, and excellent film uniformity. Their excellent electrical conductivity and optical transmittance make them the most important transparent conductive films in the modern optoelectronic industry. We have comprehensive after-sales service. Please contact us for information.
High-performance transparent conductive material
Excellent target utilization
Stable sputtering and uniform film deposition
Superior film performance
Wide range of applications
Comprehensive bonding services
Customizable solutions
Display and Touch Technology:Used in LCD, OLED, and touch panel manufacturing as a transparent conductive electrode, providing excellent electrical conductivity and optical transmittance.
Photovoltaic Devices:Serves as a transparent electrode layer in thin-film solar cells such as CIGS, CdTe, and perovskite types, improving light transmission and conversion efficiency.
Optoelectronic and Research Applications:Utilized in photodetectors, electrochromic devices, and R&D coating systems for developing advanced transparent conductive films.
Years of expertise in the industry
Experience in processing high-purity, high-quality materials
Comprehensive bonding solutions
Stable thin film performance
Professional customization capabilities
Global service and support
1. What is an Indium Tin Oxide (ITO) Rotary Target?
An Indium Tin Oxide (ITO) Rotary Target is a cylindrical sputtering target made from indium tin oxide (ITO) for large-area thin-film deposition using rotary magnetron sputtering systems. Compared with planar targets, rotary targets provide continuous target rotation during sputtering, enabling efficient material utilization and stable coating performance.
2. What are ITO Rotary Targets used for?
ITO Rotary Targets are mainly used for large-area deposition of transparent conductive oxide (TCO) films in applications such as flat panel displays, touch panels, photovoltaic devices, architectural glass coatings, and other industrial thin-film coating processes. They are especially suitable for production systems requiring uniform coating over large substrates.
3. What is the difference between an ITO Rotary Target and a Planar ITO Target?
The main difference is the target geometry and sputtering configuration. ITO Rotary Targets have a cylindrical shape and rotate during deposition, while planar ITO Targets use a flat target surface. Rotary targets generally provide higher material utilization efficiency, more uniform erosion, and longer operating time in large-area industrial coating systems.
4. Why are ITO Rotary Targets preferred for large-area coating applications?
ITO Rotary Targets are preferred for large-area coating because the rotating cylindrical design helps distribute erosion more evenly across the target surface. This can improve target utilization efficiency, extend target lifetime, reduce process interruptions, and support stable thin-film production.
5. How do I choose an ITO Rotary Target?
When choosing an ITO Rotary Target, consider ITO composition, purity, target density, tube diameter, target length, bonding method, sputtering equipment compatibility, and required film performance. The target specification should match the coating system and production requirements.
6. What specifications are available for ITO Rotary Targets?
ITO Rotary Targets can be supplied with different dimensions, including tube diameter, length, wall thickness, composition, purity, density, and bonding configurations. Specifications are usually customized according to the customer’s sputtering equipment and deposition requirements.
7. Can ITO Rotary Targets be customized?
Yes. ITO Rotary Targets can be customized according to composition ratio, purity, dimensions, density requirements, bonding technology, and sputtering system specifications. Customized solutions can be provided for display, photovoltaic, optical coating, and other large-area thin-film applications.
Each batch of products is supplied with:
Certificate of Analysis (COA)
Technical Data Sheet (TDS)
Material Safety Data Sheet (MSDS)
Third-party testing reports are available upon request to meet industrial and research standards.
Molecular Formula: In₂O₃–SnO₂
Appearance: Off-white or silver-gray, dense rotating target
Melting Point: ~1900°C
Boiling Point: ~2000°C
Crystal Structure: Cubic (In₂O₃ as the primary phase)
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
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