Aluminum Oxide Sputtering Targets are high-performance ceramic materials designed for use in thin-film deposition processes requiring excellent hardness, chemical stability, and insulating properties. With high purity and dense microstructure, these targets ensure uniform film formation, excellent adhesion, and minimal contamination.
Our Al₂O₃ sputtering targets come in various shapes and sizes, including circular and rectangular plates, and can be customized according to your specific process needs. We also offer comprehensive after-sales support—please feel free to contact us if you have any questions.
Purity: ≥99.9% to 99.99%
High hardness and excellent chemical stability
Dense, defect-free microstructure for uniform film deposition
Customizable sizes and shapes
Semiconductors: Used as dielectric insulation layers and passivation films.
Optical Coatings: Provides anti-reflective and protective coatings on lenses, displays, and mirrors.
Protective Films: Applied in wear-resistant and corrosion-resistant coatings.
Electronic Devices: Used in capacitors, sensors, and other devices requiring high dielectric strength.
Certificate of Analysis (COA)
Material Safety Data Sheet (MSDS)
Density and purity verification reports
Third-party testing support available on request
Why Choose Us?
As a reliable aluminum oxide sputtering target supplier, we provide high-purity aluminum oxide (Al₂O₃) sputtering targets (≥99.95%) with customizable options, advanced manufacturing for stable performance, expert support, and dependable global delivery.
Chemical Formula: Al₂O₃
Appearance: White to off-white
Density: 3.95–4.05 g/cm³
Melting Point: Approx. 2072 °C
Boiling Point: >2977 °C
Thermal Conductivity: 25–35 W/m·K (depending on density)
Electrical Conductivity: Insulating (high resistivity)
Thermal Expansion Coefficient: ~7–8 × 10⁻⁶ /K
Not classified as hazardous
Inner packaging: Vacuum-sealed bag to protect against contamination and moisture.
Outer packaging: Carton or wooden box, depending on size and weight.
Fragile targets: Special protective packaging is used to ensure safe transport.
If you need any service, please contact us
