Hafnium Zirconium Oxide sputtering targets are advanced composite ceramic materials designed for high-performance thin-film deposition processes. Combining the superior properties of hafnium oxide and zirconium oxide, these targets offer high purity, high density, and excellent thermal stability, ensuring uniform, dense deposited films with strong adhesion and minimal impurities.
We offer Hafnium Zirconium Oxide sputtering targets in a variety of composition ratios and sizes, and can customize specifications to meet customer needs. We also provide comprehensive technical support and after-sales service to ensure a smooth and efficient production process.
Purity: 99.9%
High-density sintering ensures uniform thin-film deposition
Excellent thermal stability and mechanical strength
Customizable composition ratios, sizes, and shapes
Suitable for advanced semiconductors, high-k dielectric layers, and optical coatings
Semiconductor Industry: Used as a high-k gate dielectric material to enhance transistor performance and stability.
Optical Coatings: Used for the production of anti-reflective and high-refractive-index optical films for applications such as lenses, displays, and lasers.
Ceramic Materials: Suitable for high-temperature, wear-resistant ceramic coatings to extend device life. MEMS devices: Functional thin film deposition for microelectromechanical systems (MEMS) ensures excellent electrical and mechanical properties.
We provide a detailed Certificate of Analysis (COA), Material Safety Data Sheet (MSDS), and performance test report for each batch of products. We also support authoritative third-party testing services to ensure product quality meets industry standards and customer requirements.
Molecular Formula: HfO₂–ZrO₂
Appearance: White, dense ceramic target with a smooth surface
Melting Point: Approximately 2,700°C (composite ceramic stable at high temperatures)
Crystal Structure: Primarily a mixture of tetragonal and monoclinic phases
Inner Packaging: Vacuum-sealed bags and boxed to prevent contamination and moisture.
Outer Packaging: Cartons or wooden crates selected based on size and weight.
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