{"id":60273,"date":"2026-11-06T16:16:07","date_gmt":"2026-11-06T08:16:07","guid":{"rendered":"https:\/\/ulpmat.com\/%e3%82%b7%e3%83%aa%e3%82%b5%e3%82%a4%e3%83%89%e8%96%84%e8%86%9c%e3%81%ae%e6%88%90%e8%86%9c%ef%bc%9a%e3%82%b9%e3%83%91%e3%83%83%e3%82%bf%e3%83%aa%e3%83%b3%e3%82%b0%e3%80%81%e3%82%b5%e3%83%aa%e3%82%b5\/"},"modified":"2026-11-06T16:26:17","modified_gmt":"2026-11-06T08:26:17","slug":"%e3%82%b7%e3%83%aa%e3%82%b5%e3%82%a4%e3%83%89%e8%96%84%e8%86%9c%e3%81%ae%e6%88%90%e8%86%9c%ef%bc%9a%e3%82%b9%e3%83%91%e3%83%83%e3%82%bf%e3%83%aa%e3%83%b3%e3%82%b0%e3%80%81%e3%82%b5%e3%83%aa%e3%82%b5","status":"publish","type":"post","link":"https:\/\/ulpmat.com\/ja\/%e3%82%b7%e3%83%aa%e3%82%b5%e3%82%a4%e3%83%89%e8%96%84%e8%86%9c%e3%81%ae%e6%88%90%e8%86%9c%ef%bc%9a%e3%82%b9%e3%83%91%e3%83%83%e3%82%bf%e3%83%aa%e3%83%b3%e3%82%b0%e3%80%81%e3%82%b5%e3%83%aa%e3%82%b5\/","title":{"rendered":"\u30b7\u30ea\u30b5\u30a4\u30c9\u8584\u819c\u306e\u6210\u819c\uff1a\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3001\u30b5\u30ea\u30b5\u30a4\u30c9\u3001\u304a\u3088\u3073\u76f8\u5236\u5fa1"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"60273\" class=\"elementor elementor-60273 elementor-60249\" data-elementor-post-type=\"post\">\n\t\t\t\t<div class=\"elementor-element elementor-element-5b2809f e-flex e-con-boxed e-con e-parent\" data-id=\"5b2809f\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-615a721 elementor-widget elementor-widget-text-editor\" data-id=\"615a721\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p data-pm-slice=\"1 1 []\">\u30b7\u30ea\u30b5\u30a4\u30c9\u8584\u819c\u306e\u6210\u819c\u306f\u3001\u5358\u306b\u9069\u5207\u306a\u91d1\u5c5e\u30b7\u30ea\u30b5\u30a4\u30c9\u3092\u9078\u3076\u3053\u3068\u3060\u3051\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002 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data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">1. \u30b7\u30ea\u30b5\u30a4\u30c9\u8584\u819c\u306e\u6210\u819c\u3068\u306f\u4f55\u304b\uff1f<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6083963 elementor-widget elementor-widget-text-editor\" data-id=\"6083963\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u30b7\u30ea\u30b5\u30a4\u30c9\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u3068\u30c1\u30bf\u30f3\u3001\u30cb\u30c3\u30b1\u30eb\u3001\u30b3\u30d0\u30eb\u30c8\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u3001\u30e2\u30ea\u30d6\u30c7\u30f3\u306a\u3069\u306e\u91d1\u5c5e\u3068\u306e\u9593\u306b\u5f62\u6210\u3055\u308c\u308b\u5316\u5408\u7269\u3067\u3059\u3002\u3053\u308c\u3089\u306f\u96fb\u5b50\u6750\u6599\u3084 <span style=\"color: #0000ff;\"><a style=\"color: #0000ff;\" href=\"https:\/\/ulpmat.com\/ja\/%e3%82%a2%e3%83%97%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e5%8d%8a%e5%b0%8e%e4%bd%93%e6%9d%90%e6%96%99\/\">\u534a\u5c0e\u4f53<\/a> 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[]\">\u4e00\u822c\u7684\u306a\u30b7\u30ea\u30b5\u30a4\u30c9\u7cfb\u306b\u306f\u3001\u4ee5\u4e0b\u306e\u3082\u306e\u304c\u3042\u308b\uff1a<\/p><table style=\"border-collapse: collapse; width: 100%;\"><tbody><tr><td style=\"width: 33.2617%; border-style: solid; border-color: #636060; text-align: center;\"><strong>\u30b7\u30ea\u30b5\u30a4\u30c9<\/strong><\/td><td style=\"width: 66.7383%; border-style: solid; border-color: #636060; text-align: center;\"><strong>\u4ee3\u8868\u7684\u306a\u6750\u6599\u307e\u305f\u306f\u30d7\u30ed\u30bb\u30b9\u3068\u306e\u95a2\u9023\u6027<\/strong><\/td><\/tr><tr><td style=\"width: 33.2617%; border-style: solid; border-color: #636060; text-align: center;\">\u4e8c\u30b1\u30a4\u5316\u30c1\u30bf\u30f3\uff08TiSi\u2082\uff09<\/td><td style=\"width: 66.7383%; border-style: solid; border-color: #636060; text-align: center;\">\u4f4e\u62b5\u6297\u30b3\u30f3\u30bf\u30af\u30c8\u304a\u3088\u3073\u914d\u7dda\u7528\u9014\u306b\u304a\u3044\u3066\u3001\u6b74\u53f2\u7684\u306b\u91cd\u8981\u3067\u3042\u3063\u305f<\/td><\/tr><tr><td style=\"width: 33.2617%; border-style: solid; border-color: #636060; text-align: center;\">\u30b3\u30d0\u30eb\u30c8\u30b8\u30b7\u30ea\u30b5\u30a4\u30c9 (CoSi\u2082)<\/td><td style=\"width: 66.7383%; border-style: solid; border-color: #636060; text-align: center;\">\u534a\u5c0e\u4f53\u306e\u30b3\u30f3\u30bf\u30af\u30c8\u304a\u3088\u3073\u754c\u9762\u306e\u7814\u7a76\u306b\u4f7f\u7528\u3055\u308c\u308b<\/td><\/tr><tr><td style=\"width: 33.2617%; border-style: solid; border-color: #636060; text-align: center;\">\u4e8c\u30b1\u30a4\u5316\u30cb\u30c3\u30b1\u30eb\uff08NiSi\u2082\uff09<\/td><td style=\"width: 66.7383%; border-style: solid; border-color: #636060; text-align: center;\">\u69cb\u9020\u7684\u304a\u3088\u3073\u96fb\u6c17\u7684\u7279\u6027\u304c\u7570\u306a\u308b\u3001\u30cb\u30c3\u30b1\u30eb\u30fb\u30b7\u30ea\u30b3\u30f3\u306e\u7279\u7570\u306a\u76f8<\/td><\/tr><tr><td style=\"width: 33.2617%; border-style: solid; border-color: #636060; text-align: center;\">\u4e8c\u30b1\u30a4\u5316\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\uff08WSi\u2082\uff09<\/td><td style=\"width: 66.7383%; border-style: solid; border-color: #636060; text-align: center;\">\u9ad8\u6e29\u6750\u6599\u304a\u3088\u3073\u7279\u5b9a\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3067\u4f7f\u7528\u3055\u308c\u308b<\/td><\/tr><tr><td style=\"width: 33.2617%; border-style: solid; border-color: #636060; text-align: center;\">\u4e8c\u30e2\u30ea\u30d6\u30c7\u30f3\u30b7\u30ea\u30b5\u30a4\u30c9\uff08MoSi\u2082\uff09<\/td><td style=\"width: 66.7383%; border-style: solid; border-color: #636060; text-align: center;\">\u9ad8\u6e29\u3067\u306e\u8010\u9178\u5316\u6027\u7528\u9014\u3084\u6a5f\u80fd\u6027\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3068\u3057\u3066\u77e5\u3089\u308c\u3066\u3044\u308b<\/td><\/tr><\/tbody><\/table><p data-pm-slice=\"1 1 []\">\u5229\u7528\u53ef\u80fd\u306a\u6210\u819c\u6750\u6599\u306e\u3088\u308a\u5e83\u7bc4\u306a\u6982\u8981\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u3092\u53c2\u7167\u3057\u3066\u304f\u3060\u3055\u3044<span style=\"color: #0000ff;\"> <a style=\"color: #0000ff;\" href=\"https:\/\/ulpmat.com\/ja\/product-category\/%e8%96%84%e8%86%9c%e5%a0%86%e7%a9%8d%e6%9d%90%e6%96%99\/\">ULPMAT\u306e\u8584\u819c\u6210\u819c\u6750\u6599<\/a><\/span>\u3002\u3053\u308c\u306b\u306f\u3001\u91d1\u5c5e\u3001\u5408\u91d1\u3001\u30bb\u30e9\u30df\u30c3\u30af\u88fd\u306e\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8\u306b\u52a0\u3048\u3001\u84b8\u7740\u6750\u6599\u3082\u542b\u307e\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9b1d5b2 elementor-widget elementor-widget-heading\" data-id=\"9b1d5b2\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">2. \u8584\u819c\u306e\u7279\u6027\u306b\u3068\u3063\u3066\u91cd\u8981\u306a\u30b7\u30ea\u30b5\u30a4\u30c9\u76f8\u306f\u3069\u308c\u304b\uff1f<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ee8f213 elementor-widget elementor-widget-text-editor\" data-id=\"ee8f213\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p data-pm-slice=\"1 1 []\">\u30b7\u30ea\u30b5\u30a4\u30c9\u819c\u306e\u76f8\u7d44\u6210\u306f\u3001\u305d\u306e\u96fb\u6c17\u62b5\u6297\u7387\u3001\u5fae\u7d30\u69cb\u9020\u3001\u304a\u3088\u3073\u305d\u306e\u5f8c\u306e\u52a0\u5de5\u5de5\u7a0b\u306b\u304a\u3051\u308b\u5b89\u5b9a\u6027\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p><p>\u3053\u308c\u306f\u3001\u7279\u306b\u30c1\u30bf\u30f3\u30b7\u30ea\u30b5\u30a4\u30c9\u7cfb\u306b\u304a\u3044\u3066\u91cd\u8981\u3067\u3042\u308b\u3002TiSi\u2082\u306f\u3001\u4e00\u822c\u7684\u306b\u8b70\u8ad6\u3055\u308c\u308b2\u3064\u306e\u76f8\u3068\u3057\u3066\u5f62\u6210\u3055\u308c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\uff1a<\/p><ul data-spread=\"false\"><li><p><strong>C49-TiSi\u2082\uff1a<\/strong>\u30c1\u30bf\u30f3\u3068\u30b7\u30ea\u30b3\u30f3\u306e\u53cd\u5fdc\u306e\u521d\u671f\u6bb5\u968e\u3067\u5f62\u6210\u3055\u308c\u308b\u53ef\u80fd\u6027\u306e\u3042\u308b\u6e96\u5b89\u5b9a\u76f8\u3002<\/p><\/li><li><p><strong>C54-TiSi\u2082\uff1a<\/strong>\u95a2\u9023\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u4e0b\u3067\u71b1\u529b\u5b66\u7684\u306b\u5b89\u5b9a\u306a\u76f8\u3067\u3042\u308a\u3001\u4e00\u822c\u306bC49-TiSi\u2082\u3088\u308a\u3082\u96fb\u6c17\u62b5\u6297\u7387\u304c\u4f4e\u3044\u3002<\/p><\/li><\/ul><p>\u3057\u305f\u304c\u3063\u3066\u3001\u4f4e\u62b5\u6297\u306e\u30c1\u30bf\u30f3\u30b7\u30ea\u30b5\u30a4\u30c9\u304c\u8981\u6c42\u3055\u308c\u308b\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u306f\u3001C49\u304b\u3089C54\u3078\u306e\u76f8\u8ee2\u79fb\u304c\u91cd\u8981\u306a\u8003\u616e\u4e8b\u9805\u3068\u306a\u308b\u3002<\/p><p>\u3057\u304b\u3057\u3001\u76f8\u306e\u5f62\u6210\u306f\u6e29\u5ea6\u3060\u3051\u3067\u6c7a\u307e\u308b\u308f\u3051\u3067\u306f\u306a\u3044\u3002\u819c\u539a\u3001\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u306e\u7d50\u6676\u65b9\u4f4d\u3001\u5fae\u7d30\u69cb\u9020\u3001\u4e0d\u7d14\u7269\u3001\u754c\u9762\u72b6\u614b\u3001\u304a\u3088\u3073\u30a2\u30cb\u30fc\u30eb\u5c65\u6b74\u306e\u3059\u3079\u3066\u304c\u3001\u3053\u306e\u76f8\u8ee2\u79fb\u306b\u5f71\u97ff\u3092\u53ca\u307c\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002<\/p><p>\u4ed6\u306e\u91d1\u5c5e-\u30b7\u30ea\u30b3\u30f3\u7cfb\u306b\u306f\u3001\u305d\u308c\u305e\u308c\u56fa\u6709\u306e\u76f8\u56f3\u3068\u53cd\u5fdc\u7d4c\u8def\u304c\u3042\u308a\u307e\u3059\u3002TiSi\u2082 \u306e C49 \u304b\u3089 C54 \u3078\u306e\u76f8\u8ee2\u79fb\u3092\u3001\u3059\u3079\u3066\u306e\u30b7\u30ea\u30b5\u30a4\u30c9\u6750\u6599\u306b\u4e00\u822c\u5316\u3057\u3066\u8003\u3048\u308b\u3079\u304d\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p><p><strong>\u30b7\u30ea\u30b5\u30a4\u30c9\u306e\u76f8\u306f\u3069\u306e\u3088\u3046\u306b\u8a55\u4fa1\u3059\u308c\u3070\u3088\u3044\u306e\u3067\u3057\u3087\u3046\u304b\uff1f<\/strong><\/p><p>X\u7dda\u56de\u6298\uff08XRD\uff09\u306f\u3001\u7d50\u6676\u76f8\u3092\u540c\u5b9a\u3057\u3001\u30d7\u30ed\u30bb\u30b9\u4e2d\u306e\u76f8\u5909\u5316\u3092\u8abf\u67fb\u3059\u308b\u305f\u3081\u306b\u4e00\u822c\u7684\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002\u819c\u3084\u7528\u9014\u306b\u3088\u3063\u3066\u306f\u3001\u4ee5\u4e0b\u306e\u8ffd\u52a0\u624b\u6cd5\u304c\u5fc5\u8981\u306b\u306a\u308b\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002<\/p><ul data-spread=\"false\"><li><p><strong>4\u70b9\u30d7\u30ed\u30fc\u30d6\u6cd5\uff1a<\/strong>\u30b7\u30fc\u30c8\u62b5\u6297\u3092\u6e2c\u5b9a\u3057\u3001\u30a2\u30cb\u30fc\u30eb\u4e2d\u306e\u96fb\u6c17\u7684\u5909\u5316\u306e\u8a55\u4fa1\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002<\/p><\/li><li><p><strong>\u8d70\u67fb\u578b\u96fb\u5b50\u9855\u5fae\u93e1\uff08SEM\uff09\uff1a<\/strong>\u8868\u9762\u5f62\u614b\u3001\u7d50\u6676\u7c92\u69cb\u9020\u3001\u304a\u3088\u3073\u51dd\u96c6\u306e\u53ef\u80fd\u6027\u3092\u89b3\u5bdf\u3057\u307e\u3059\u3002<\/p><\/li><li><p><strong>\u900f\u904e\u578b\u96fb\u5b50\u9855\u5fae\u93e1\uff08TEM\uff09\uff1a<\/strong>\u754c\u9762\u3001\u7d50\u6676\u7c92\u69cb\u9020\u3001\u304a\u3088\u3073\u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u306e\u76f8\u306b\u95a2\u3059\u308b\u8a73\u7d30\u306a\u60c5\u5831\u3092\u63d0\u4f9b\u3059\u308b\u3002<\/p><\/li><li><p><strong>\u30a8\u30cd\u30eb\u30ae\u30fc\u5206\u6563\u578bX\u7dda\u5206\u5149\u6cd5\uff08EDS\uff09\uff1a<\/strong>\u5143\u7d20\u5206\u5e03\u3084\u5c40\u6240\u7684\u306a\u7d44\u6210\u306e\u89e3\u6790\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002<\/p><\/li><\/ul><p>\u5358\u4e00\u306e\u6e2c\u5b9a\u3060\u3051\u3067\u306f\u5b8c\u5168\u306a\u5168\u4f53\u50cf\u3092\u628a\u63e1\u3059\u308b\u3053\u3068\u306f\u3067\u304d\u307e\u305b\u3093\u3002\u76f8\u306e\u540c\u5b9a\u3001\u96fb\u6c17\u7684\u7279\u6027\u8a55\u4fa1\u3001\u304a\u3088\u3073\u5fae\u7d30\u69cb\u9020\u89e3\u6790\u306f\u3001\u3053\u308c\u3089\u3092\u7dcf\u5408\u7684\u306b\u89e3\u91c8\u3059\u308b\u3053\u3068\u3067\u6700\u3082\u6709\u7528\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-54685c6 elementor-widget elementor-widget-heading\" data-id=\"54685c6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">3. TiSi\u2082\u819c\u306b\u304a\u3044\u3066\u3001C49\u304b\u3089C54\u3078\u306e\u8ee2\u79fb\u304c\u306a\u305c\u91cd\u8981\u306a\u306e\u304b\uff1f<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-032e401 elementor-widget elementor-widget-image\" data-id=\"032e401\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"750\" height=\"500\" src=\"https:\/\/ulpmat.com\/wp-content\/uploads\/2026\/11\/silicide-thin-film-deposition-ulpmat-silicide-wafer1.jpg\" class=\"attachment-large size-large wp-image-60275\" alt=\"\u30b7\u30ea\u30b5\u30a4\u30c9\u8584\u819c\u306e\u6210\u819c \u2013 ULPMAT\u793e\u88fd\u534a\u5c0e\u4f53\u7528\u9014\u5411\u3051\u30b7\u30ea\u30b5\u30a4\u30c9\u30a6\u30a7\u30cf\u30fc\" srcset=\"https:\/\/ulpmat.com\/wp-content\/uploads\/2026\/11\/silicide-thin-film-deposition-ulpmat-silicide-wafer1.jpg 750w, https:\/\/ulpmat.com\/wp-content\/uploads\/2026\/11\/silicide-thin-film-deposition-ulpmat-silicide-wafer1-300x200.jpg 300w, https:\/\/ulpmat.com\/wp-content\/uploads\/2026\/11\/silicide-thin-film-deposition-ulpmat-silicide-wafer1-600x400.jpg 600w\" sizes=\"(max-width: 750px) 100vw, 750px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0d20595 elementor-widget elementor-widget-text-editor\" data-id=\"0d20595\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p data-pm-slice=\"1 1 []\">C49\u304b\u3089C54\u3078\u306e\u76f8\u8ee2\u79fb\u306f\u3001\u30b7\u30ea\u30b5\u30a4\u30c9\u8584\u819c\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u76f8\u5236\u5fa1\u306e\u6700\u3082\u3088\u304f\u77e5\u3089\u308c\u305f\u4f8b\u306e\u4e00\u3064\u3067\u3042\u308b\u3002<\/p><p>\u6210\u819c\u3055\u308c\u305f\u30c1\u30bf\u30f3\u3068\u30b7\u30ea\u30b3\u30f3\u3068\u306e\u53cd\u5fdc\u306e\u904e\u7a0b\u3067\u3001\u6700\u521d\u306bC49-TiSi\u2082\u304c\u5f62\u6210\u3055\u308c\u308b\u3053\u3068\u304c\u3042\u308b\u3002\u3055\u3089\u306b\u71b1\u51e6\u7406\u3092\u884c\u3046\u3053\u3068\u3067C54-TiSi\u2082\u306e\u5f62\u6210\u304c\u4fc3\u9032\u3055\u308c\u3001\u4f4e\u62b5\u6297\u6027\u304c\u6c42\u3081\u3089\u308c\u308b\u5834\u5408\u306b\u306f\u4e00\u822c\u7684\u306bC54-TiSi\u2082\u304c\u597d\u307e\u308c\u308b\u3002<\/p><p>\u5f93\u6765\u306e Ti\/Si \u53cd\u5fdc\u7cfb\u3067\u306f\u3001\u3053\u306e\u76f8\u8ee2\u79fb\u306f\u591a\u304f\u306e\u5834\u5408\u3001700\uff5e900\u00b0C \u7a0b\u5ea6\u3068\u3044\u3046\u304a\u304a\u3088\u305d\u306e\u6e29\u5ea6\u7bc4\u56f2\u5185\u3067\u8b70\u8ad6\u3055\u308c\u3066\u3044\u307e\u3059\u3002 \u3053\u306e\u7bc4\u56f2\u306f\u3001\u666e\u904d\u7684\u306a\u30d7\u30ed\u30bb\u30b9\u4ed5\u69d8\u3068\u3044\u3046\u3088\u308a\u306f\u3001\u4e00\u822c\u7684\u306a\u76ee\u5b89\u3067\u3042\u308b\u3002\u516c\u8868\u3055\u308c\u3066\u3044\u308b\u7814\u7a76\u3067\u306f\u3001\u819c\u539a\u3001\u57fa\u677f\u306e\u914d\u5411\u3001\u5b9f\u9a13\u88c5\u7f6e\u306b\u5fdc\u3058\u3066\u7570\u306a\u308b\u8ee2\u79fb\u6761\u4ef6\u304c\u5831\u544a\u3055\u308c\u3066\u3044\u308b\u3002\u307e\u305f\u3001\u4e00\u90e8\u306e\u7279\u6b8a\u306a\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u3088\u308a\u4f4e\u3044\u6e29\u5ea6\u3067C54\u306e\u5f62\u6210\u306b\u6210\u529f\u3057\u3066\u3044\u308b\u3002<\/p><p>\u4ee5\u4e0b\u306e\u8981\u56e0\u3092\u8003\u616e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\uff1a<\/p><p><strong>\u819c\u539a\uff1a<\/strong>\u8584\u819c\u306f\u3001\u539a\u819c\u3068\u306f\u7570\u306a\u308b\u76f8\u8ee2\u79fb\u6319\u52d5\u3092\u793a\u3059\u3053\u3068\u304c\u3042\u308b\u3002\u819c\u539a\u306b\u4f9d\u5b58\u3059\u308b\u5909\u5316\u306f\u3001\u6e2c\u5b9a\u3055\u308c\u308b\u62b5\u6297\u7387\u306b\u3082\u5f71\u97ff\u3092\u53ca\u307c\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002<\/p><p><strong>\u57fa\u677f\u306e\u914d\u5411\uff1a<\/strong>\u30b7\u30ea\u30b3\u30f3\u306e\u7d50\u6676\u5b66\u7684\u914d\u5411\u306f\u3001\u6838\u751f\u6210\u3084\u76f8\u306e\u5f62\u6210\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p><p><strong>\u5fae\u7d30\u69cb\u9020\uff1a<\/strong>\u7d50\u6676\u7c92\u5f84\u3001\u754c\u9762\u69cb\u9020\u3001\u304a\u3088\u3073\u6b20\u9665\u306f\u3001\u6700\u7d42\u7684\u306a\u30b7\u30ea\u30b5\u30a4\u30c9\u76f8\u306e\u5f62\u6210\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p><p><strong>\u4e0d\u7d14\u7269\u304a\u3088\u3073\u6c5a\u67d3\uff1a<\/strong>\u4e0d\u8981\u306a\u5143\u7d20\u3084\u8868\u9762\u6c5a\u67d3\u306f\u3001\u754c\u9762\u53cd\u5fdc\u3084\u819c\u306e\u5747\u4e00\u6027\u306b\u60aa\u5f71\u97ff\u3092\u53ca\u307c\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002<\/p><p><strong>\u30a2\u30cb\u30fc\u30eb\u6761\u4ef6\uff1a<\/strong>\u6e29\u5ea6\u3001\u4fdd\u6301\u6642\u9593\u3001\u6607\u6e29\u901f\u5ea6\u3001\u304a\u3088\u3073\u96f0\u56f2\u6c17\u306f\u3059\u3079\u3066\u3001\u53cd\u5fdc\u306e\u9032\u884c\u3068\u76f8\u306e\u5f62\u6210\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u307e\u3059\u3002<\/p><p>\u904e\u5ea6\u306a\u71b1\u66dd\u9732\u306f\u3001\u7d50\u6676\u7c92\u306e\u6210\u9577\u3001\u819c\u306e\u51dd\u96c6\u3001\u3042\u308b\u3044\u306f\u754c\u9762\u306e\u52a3\u5316\u306a\u3069\u3001\u4ed6\u306e\u554f\u984c\u3092\u5f15\u304d\u8d77\u3053\u3059\u53ef\u80fd\u6027\u3082\u3042\u308a\u307e\u3059\u3002\u3057\u305f\u304c\u3063\u3066\u3001\u76ee\u7684\u306f\u5358\u306b\u30a2\u30cb\u30fc\u30eb\u6e29\u5ea6\u3092\u4e0a\u3052\u308b\u306e\u3067\u306f\u306a\u304f\u3001\u819c\u306e\u9023\u7d9a\u6027\u3068\u96fb\u6c17\u7684\u6027\u80fd\u3092\u7dad\u6301\u3057\u3064\u3064\u3001\u6240\u671b\u306e\u76f8\u3092\u751f\u6210\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u3092\u7279\u5b9a\u3059\u308b\u3053\u3068\u306b\u3042\u308a\u307e\u3059\u3002<\/p><p>\u30c1\u30bf\u30f3\u30b7\u30ea\u30b5\u30a4\u30c9\u3092\u539f\u6599\u3068\u3057\u3066\u7814\u7a76\u3092\u884c\u3063\u3066\u3044\u308b\u7814\u7a76\u8005\u5411\u3051\u306b\u3001ULPMAT\u306f<span style=\"color: #0000ff;\"><a style=\"color: #0000ff;\" href=\"https:\/\/ulpmat.com\/ja\/product\/%e7%8f%aa%e5%8c%96%e3%83%81%e3%82%bf%e3%83%b3-2\/\">\u30c1\u30bf\u30f3\u30b7\u30ea\u30b5\u30a4\u30c9\u7c89\u672b\uff08TiSi\u2082\uff09<\/a><\/span>\u3092\u63d0\u4f9b\u3057\u3066\u3044\u307e\u3059<span style=\"color: #0000ff;\">\u3002<\/span>\u8a18\u8f09\u3055\u308c\u3066\u3044\u308b\u4ed5\u69d8\u306b\u306f\u3001\u7d14\u5ea699.5\uff05\u304a\u3088\u3073-325\u30e1\u30c3\u30b7\u30e5\u304c\u542b\u307e\u308c\u307e\u3059\u3002\u7c89\u672b\u306e\u4ed5\u69d8\u306f\u3001\u6210\u819c\u3055\u308c\u305f\u8584\u819c\u3084\u5b8c\u6210\u3057\u305f\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u8981\u4ef6\u3068\u306f\u5225\u306b\u8a55\u4fa1\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b3a033f elementor-widget elementor-widget-heading\" data-id=\"b3a033f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">4. \u3069\u306e\u30b7\u30ea\u30b5\u30a4\u30c9\u819c\u5f62\u6210\u6cd5\u3092\u9078\u3076\u3079\u304d\u304b\uff1f<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e308a4c elementor-widget elementor-widget-text-editor\" data-id=\"e308a4c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p data-pm-slice=\"1 1 []\">\u30b7\u30ea\u30b5\u30a4\u30c9\u8584\u819c\u306f\u3001\u3055\u307e\u3056\u307e\u306a\u624b\u6cd5\u306b\u3088\u3063\u3066\u4f5c\u88fd\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u3069\u306e\u624b\u6cd5\u304c\u6700\u3082\u9069\u3057\u3066\u3044\u308b\u304b\u306f\u3001\u6750\u6599\u7cfb\u3001\u57fa\u677f\u3001\u8584\u819c\u306e\u8981\u4ef6\u3001\u304a\u3088\u3073\u5229\u7528\u53ef\u80fd\u306a\u30d7\u30ed\u30bb\u30b9\u88c5\u7f6e\u306b\u3088\u3063\u3066\u7570\u306a\u308a\u307e\u3059\u3002<\/p><p><strong>4.1 \u30b7\u30ea\u30b5\u30a4\u30c9\u30bf\u30fc\u30b2\u30c3\u30c8\u3092\u7528\u3044\u305f\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0<\/strong><\/p><p>\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306f\u3001\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u30a4\u30aa\u30f3\u304c\u56fa\u4f53\u30bf\u30fc\u30b2\u30c3\u30c8\u306b\u885d\u7a81\u3057\u3001\u7269\u8cea\u3092\u653e\u51fa\u3055\u305b\u308b\u7269\u7406\u6c17\u76f8\u6210\u9577\uff08PVD\uff09\u6280\u8853\u3067\u3042\u308b\u3002\u653e\u51fa\u3055\u308c\u305f\u7269\u8cea\u306f\u771f\u7a7a\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u3092\u79fb\u52d5\u3057\u3001\u57fa\u677f\u4e0a\u306b\u5806\u7a4d\u3057\u3066\u5f90\u3005\u306b\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u3002<\/p><p>\u30b7\u30ea\u30b5\u30a4\u30c9\u30bf\u30fc\u30b2\u30c3\u30c8\u3092\u4f7f\u7528\u3059\u308b\u5834\u5408\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u7d44\u6210\u304c\u6210\u819c\u306e\u539f\u6599\u3068\u306a\u308a\u307e\u3059\u3002\u3057\u304b\u3057\u3001\u6210\u819c\u3055\u308c\u305f\u8584\u819c\u306e\u7d44\u6210\u3084\u76f8\u304c\u3001\u5fc5\u305a\u3057\u3082\u30bf\u30fc\u30b2\u30c3\u30c8\u3068\u5b8c\u5168\u306b\u4e00\u81f4\u3059\u308b\u3068\u306f\u9650\u308a\u307e\u305b\u3093\u3002\u512a\u5148\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3001\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u3001\u57fa\u677f\u6e29\u5ea6\u3001\u304a\u3088\u3073\u6210\u819c\u5f8c\u306e\u51e6\u7406\u304c\u3001\u6700\u7d42\u7684\u306a\u8584\u819c\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p><p>\u91cd\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u5909\u6570\u306b\u306f\u4ee5\u4e0b\u304c\u542b\u307e\u308c\u308b\uff1a<\/p><ul data-spread=\"false\"><li><p>\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u96fb\u529b\u304a\u3088\u3073\u96fb\u529b\u5bc6\u5ea6<\/p><\/li><li><p>\u4f5c\u52d5\u5727\u529b\u304a\u3088\u3073\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9\u6761\u4ef6<\/p><\/li><li><p>\u30bf\u30fc\u30b2\u30c3\u30c8\u3068\u57fa\u677f\u9593\u306e\u8ddd\u96e2<\/p><\/li><li><p>\u57fa\u677f\u6e29\u5ea6<\/p><\/li><li><p>\u6210\u819c\u901f\u5ea6\u304a\u3088\u3073\u819c\u539a<\/p><\/li><li><p>\u57fa\u677f\u8868\u9762\u306e\u72b6\u614b<\/p><\/li><li><p>\u6210\u819c\u5f8c\u306e\u30a2\u30cb\u30fc\u30eb<\/p><\/li><\/ul><p>\u3057\u305f\u304c\u3063\u3066\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u6750\u6599\u306e\u9078\u5b9a\u306f\u3001\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u3084\u76ee\u6a19\u3068\u3059\u308b\u819c\u306e\u7279\u6027\u3068\u4f75\u305b\u3066\u691c\u8a0e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p><p>ULPMAT<a href=\"https:\/\/ulpmat.com\/ja\/product-category\/%e8%96%84%e8%86%9c%e5%a0%86%e7%a9%8d%e6%9d%90%e6%96%99\/%e9%87%91%e5%b1%9e%e3%82%b9%e3%83%91%e3%83%83%e3%82%bf%e3%83%aa%e3%83%b3%e3%82%b0%e3%82%bf%e3%83%bc%e3%82%b2%e3%83%83%e3%83%88\/\">\u306e\u91d1\u5c5e\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8<\/a>\u3001<a href=\"https:\/\/ulpmat.com\/ja\/product-category\/%e8%96%84%e8%86%9c%e5%a0%86%e7%a9%8d%e6%9d%90%e6%96%99\/%e5%90%88%e9%87%91%e3%82%b9%e3%83%91%e3%83%83%e3%82%bf%e3%83%aa%e3%83%b3%e3%82%b0%e3%82%bf%e3%83%bc%e3%82%b2%e3%83%83%e3%83%88\/\">\u5408\u91d1\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8<\/a>\u3001<a href=\"https:\/\/ulpmat.com\/ja\/product-category\/%e8%96%84%e8%86%9c%e5%a0%86%e7%a9%8d%e6%9d%90%e6%96%99\/%e3%82%bb%e3%83%a9%e3%83%9f%e3%83%83%e3%82%af%e3%82%b9%e3%83%91%e3%83%83%e3%82%bf%e3%83%aa%e3%83%b3%e3%82%b0%e3%82%bf%e3%83%bc%e3%82%b2%e3%83%83%e3%83%88\/\">\u304a\u3088\u3073\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8<\/a>\u3092\u3054\u89a7\u3044\u305f\u3060\u304d\u3001PVD \u30b7\u30b9\u30c6\u30e0\u3067\u4f7f\u7528\u3055\u308c\u308b\u3055\u307e\u3056\u307e\u306a\u6750\u6599\u30ab\u30c6\u30b4\u30ea\u306b\u3064\u3044\u3066\u3054\u7406\u89e3\u304f\u3060\u3055\u3044\u3002<\/p><p>\u30bf\u30fc\u30b2\u30c3\u30c8\u6750\u6599\u3068\u6210\u819c\u306e\u539f\u7406\u306b\u3064\u3044\u3066\u3088\u308a\u8a73\u3057\u304f\u77e5\u308a\u305f\u3044\u65b9\u306f\u3001<span style=\"color: #0000ff;\"><a style=\"color: #0000ff;\" href=\"https:\/\/ulpmat.com\/ja\/tco%e3%81%ae%e8%a3%bd%e9%80%a0%e3%83%97%e3%83%ad%e3%82%bb%e3%82%b9%ef%bc%9a%e7%b2%89%e6%9c%ab%e8%aa%bf%e8%a3%bd%e3%80%81%e3%82%b9%e3%83%91%e3%83%83%e3%82%bf%e3%83%aa%e3%83%b3%e3%82%b0%e3%82%bf\/\">TCO \u88fd\u9020\u30d7\u30ed\u30bb\u30b9<\/a><\/span>\u306b\u95a2\u3059\u308b\u8a18\u4e8b\u3092\u3054\u89a7\u304f\u3060\u3055\u3044<span style=\"color: #0000ff;\">\u3002<\/span>\u3053\u306e\u8a18\u4e8b\u3067\u306f<span style=\"color: #0000ff;\">\u3001<\/span>\u7c89\u672b\u306e\u8abf\u88fd\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u88fd\u9020\u3001\u8584\u819c\u306e\u6210\u819c\u3001\u304a\u3088\u3073\u819c\u306e\u7279\u6027\u8a55\u4fa1\u306e\u95a2\u4fc2\u306b\u3064\u3044\u3066\u89e3\u8aac\u3057\u3066\u3044\u307e\u3059\u3002<\/p><p><strong>4.2 \u30b5\u30ea\u30b5\u30a4\u30c9\u51e6\u7406<\/strong><\/p><p>\u30b5\u30ea\u30b5\u30a4\u30c9\uff08Salicide\uff09\u306f\u3001\u30bb\u30eb\u30d5\u30a2\u30e9\u30a4\u30f3\u30c9\u30fb\u30b7\u30ea\u30b5\u30a4\u30c9\uff08self-aligned silicide\uff09\u306e\u7565\u79f0\u3067\u3042\u308a\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u3067\u4f7f\u7528\u3055\u308c\u308b\u30d7\u30ed\u30bb\u30b9\u3067\u3059\u3002<\/p><p>\u4e00\u822c\u7684\u306a\u30b5\u30ea\u30b5\u30a4\u30c9\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u3092\u542b\u3080\u69cb\u9020\u4f53\u306e\u4e0a\u306b\u91d1\u5c5e\u5c64\u304c\u6210\u819c\u3055\u308c\u307e\u3059\u3002\u305d\u306e\u5f8c\u306e\u71b1\u51e6\u7406\u4e2d\u306b\u3001\u91d1\u5c5e\u306f\u9732\u51fa\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u3068\u53cd\u5fdc\u3057\u3066\u91d1\u5c5e\u30b7\u30ea\u30b5\u30a4\u30c9\u3092\u5f62\u6210\u3057\u307e\u3059\u3002\u305d\u306e\u5f8c\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u9806\u5e8f\u306b\u5fdc\u3058\u3066\u3001\u53cd\u5fdc\u304c\u8d77\u3053\u3089\u306a\u304b\u3063\u305f\u9818\u57df\u304b\u3089\u672a\u53cd\u5fdc\u306e\u91d1\u5c5e\u304c\u9664\u53bb\u3055\u308c\u307e\u3059\u3002<\/p><p>\u3053\u306e\u53cd\u5fdc\u306e\u30bb\u30eb\u30d5\u30a2\u30e9\u30a4\u30f3\u30e1\u30f3\u30c8\u7279\u6027\u306b\u3088\u308a\u3001\u9732\u51fa\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u307e\u305f\u306f\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u9818\u57df\u306b\u9078\u629e\u7684\u306b\u30b7\u30ea\u30b5\u30a4\u30c9\u304c\u5f62\u6210\u3055\u308c\u308b\u3002<\/p><p>\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u4ee5\u4e0b\u306e\u3044\u304f\u3064\u304b\u306e\u8981\u56e0\u306e\u5f71\u97ff\u3092\u53d7\u3051\u3084\u3059\u3044\uff1a<\/p><ul data-spread=\"false\"><li><p>\u91d1\u5c5e\u306e\u539a\u3055\u3068\u6210\u819c\u306e\u5747\u4e00\u6027<\/p><\/li><li><p>\u30b7\u30ea\u30b3\u30f3\u8868\u9762\u306e\u72b6\u614b<\/p><\/li><li><p>\u53cd\u5fdc\u6e29\u5ea6\u304a\u3088\u3073\u6642\u9593<\/p><\/li><li><p>\u76f8\u306e\u5f62\u6210\u304a\u3088\u3073\u8ee2\u79fb<\/p><\/li><li><p>\u671b\u307e\u3057\u304f\u306a\u3044\u6a2a\u65b9\u5411\u306e\u53cd\u5fdc\u3084\u30d6\u30ea\u30c3\u30b8\u30f3\u30b0<\/p><\/li><li><p>\u51dd\u96c6\u304a\u3088\u3073\u754c\u9762\u306e\u5b89\u5b9a\u6027<\/p><\/li><\/ul><p>\u9069\u5207\u306a\u91d1\u5c5e\u304a\u3088\u3073\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u306f\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u69cb\u9020\u3084\u6280\u8853\u4e16\u4ee3\u306b\u3088\u3063\u3066\u7570\u306a\u308a\u307e\u3059\u3002\u3042\u308b\u30b7\u30ea\u30b5\u30a4\u30c9\u7cfb\u5411\u3051\u306b\u958b\u767a\u3055\u308c\u305f\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u691c\u8a3c\u306a\u3057\u306b\u5225\u306e\u30b7\u30ea\u30b5\u30a4\u30c9\u7cfb\u3078\u76f4\u63a5\u8ee2\u7528\u3059\u3079\u304d\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p><p><strong>4.3 \u5316\u5b66\u6c17\u76f8\u6210\u9577\uff08CVD\uff09\u304a\u3088\u3073\u30dd\u30ea\u30b5\u30a4\u30c9\u69cb\u9020<\/strong><\/p><p>\u5316\u5b66\u6c17\u76f8\u6210\u9577\u3067\u306f\u3001\u6c17\u4f53\u72b6\u306e\u524d\u99c6\u4f53\u3092\u5c0e\u5165\u3057\u3001\u305d\u308c\u304c\u57fa\u677f\u8868\u9762\u3067\u53cd\u5fdc\u307e\u305f\u306f\u5206\u89e3\u3057\u3066\u56fa\u4f53\u819c\u3092\u5f62\u6210\u3057\u307e\u3059\u3002<\/p><p>\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3001CVD \u306f\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u4e0a\u306b\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u30b7\u30ea\u30b5\u30a4\u30c9\u5c64\u3092\u5806\u7a4d\u3055\u305b\u3001\u30dd\u30ea\u30b5\u30a4\u30c9\u69cb\u9020\u3092\u5f62\u6210\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u3066\u304d\u307e\u3057\u305f\u3002\u3053\u306e\u3088\u3046\u306a\u69cb\u9020\u306f\u3001\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u3068\u30b7\u30ea\u30b5\u30a4\u30c9\u5c64\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u3067\u3001\u96fb\u6c17\u7684\u7279\u6027\u3092\u5909\u5316\u3055\u305b\u307e\u3059\u3002<\/p><p>CVD\u3068\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306f\u3001\u6750\u6599\u306e\u4f9b\u7d66\u30e1\u30ab\u30cb\u30ba\u30e0\u304c\u7570\u306a\u308a\u307e\u3059\u3002CVD\u306f\u524d\u99c6\u4f53\u306e\u5316\u5b66\u7684\u6027\u8cea\u3001\u30ac\u30b9\u306e\u8f38\u9001\u3001\u8868\u9762\u53cd\u5fdc\u3001\u304a\u3088\u3073\u53cd\u5fdc\u6761\u4ef6\u306b\u4f9d\u5b58\u3059\u308b\u306e\u306b\u5bfe\u3057\u3001\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306f\u30bf\u30fc\u30b2\u30c3\u30c8\u304b\u3089\u306e\u6750\u6599\u306e\u7269\u7406\u7684\u306a\u653e\u51fa\u3068\u8f38\u9001\u306b\u4f9d\u5b58\u3057\u307e\u3059\u3002<\/p><p>\u3069\u3061\u3089\u306e\u65b9\u6cd5\u3092\u63a1\u7528\u3059\u308b\u304b\u306f\u3001\u819c\u306e\u7d44\u6210\u3001\u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30ea\u30c6\u30a3\u306e\u8981\u4ef6\u3001\u57fa\u677f\u306e\u5f62\u72b6\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u7d71\u5408\u6027\u3001\u304a\u3088\u3073\u5229\u7528\u53ef\u80fd\u306a\u88c5\u7f6e\u306b\u3088\u3063\u3066\u6c7a\u307e\u308b\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0fe2475 elementor-widget elementor-widget-heading\" data-id=\"0fe2475\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">5. \u30a2\u30cb\u30fc\u30eb\u6761\u4ef6\u306f\u30b7\u30ea\u30b5\u30a4\u30c9\u819c\u306e\u5f62\u6210\u306b\u3069\u306e\u3088\u3046\u306a\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u304b\uff1f<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f60d239 elementor-widget elementor-widget-text-editor\" data-id=\"f60d239\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p data-pm-slice=\"1 1 []\">\u30a2\u30cb\u30fc\u30eb\u51e6\u7406\u306f\u3001\u53cd\u5fdc\u3092\u4fc3\u9032\u3057\u305f\u308a\u3001\u7d50\u6676\u69cb\u9020\u3092\u6539\u8cea\u3057\u305f\u308a\u3001\u30b7\u30ea\u30b5\u30a4\u30c9\u819c\u306e\u96fb\u6c17\u7684\u7279\u6027\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u305f\u308a\u3059\u308b\u305f\u3081\u306b\u3057\u3070\u3057\u3070\u7528\u3044\u3089\u308c\u308b\u3002<\/p><p>\u3057\u304b\u3057\u3001\u30a2\u30cb\u30fc\u30eb\u306b\u5bfe\u3059\u308b\u53cd\u5fdc\u306f\u6750\u6599\u7cfb\u306b\u3088\u3063\u3066\u5927\u304d\u304f\u7570\u306a\u308b\u3002TiSi\u2082\u306b\u9069\u3057\u305f\u71b1\u51e6\u7406\u30d7\u30ed\u30bb\u30b9\u304c\u3001NiSi\u3001CoSi\u2082\u3001\u3042\u308b\u3044\u306fWSi\u2082\u306b\u306f\u9069\u3055\u306a\u3044\u5834\u5408\u304c\u3042\u308b\u3002<\/p><p>\u4e3b\u306a\u5909\u6570\u306b\u306f\u4ee5\u4e0b\u304c\u542b\u307e\u308c\u307e\u3059\u3002<\/p><p><strong>\u6e29\u5ea6\uff1a<\/strong>\u76f8\u306e\u5f62\u6210\u304a\u3088\u3073\u8ee2\u79fb\u306b\u95a2\u3059\u308b\u71b1\u529b\u5b66\u7684\u304a\u3088\u3073\u52d5\u529b\u5b66\u7684\u6761\u4ef6\u3092\u6c7a\u5b9a\u3059\u308b\u3002<\/p><p><strong>\u4fdd\u6301\u6642\u9593\uff1a<\/strong>\u56fa\u76f8\u53cd\u5fdc\u306e\u9032\u884c\u5ea6\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u307e\u3059\u3002\u51e6\u7406\u6642\u9593\u3092\u9577\u304f\u3057\u3066\u3082\u3001\u5fc5\u305a\u3057\u3082\u6700\u7d42\u7684\u306a\u819c\u306e\u54c1\u8cea\u304c\u5411\u4e0a\u3059\u308b\u3068\u306f\u9650\u308a\u307e\u305b\u3093\u3002<\/p><p><strong>\u96f0\u56f2\u6c17\uff1a<\/strong>\u6750\u6599\u3084\u30d7\u30ed\u30bb\u30b9\u306e\u8981\u4ef6\u306b\u5fdc\u3058\u3066\u3001\u771f\u7a7a\u3001\u4e0d\u6d3b\u6027\u30ac\u30b9\u3001\u307e\u305f\u306f\u305d\u306e\u4ed6\u306e\u5236\u5fa1\u3055\u308c\u305f\u74b0\u5883\u304c\u9078\u629e\u3055\u308c\u308b\u3002\u5236\u5fa1\u3055\u308c\u3066\u3044\u306a\u3044\u9178\u5316\u306f\u3001\u819c\u3084\u754c\u9762\u3092\u5909\u5316\u3055\u305b\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002<\/p><p><strong>\u52a0\u71b1\u30fb\u51b7\u5374\u901f\u5ea6\uff1a<\/strong>\u6838\u751f\u6210\u3001\u7d50\u6676\u7c92\u6210\u9577\u3001\u304a\u3088\u3073\u7570\u306a\u308b\u76f8\u306e\u5f62\u6210\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p><p><strong>\u57fa\u677f\u304a\u3088\u3073\u754c\u9762\uff1a<\/strong>\u57fa\u677f\u306e\u7d44\u6210\u3001\u8868\u9762\u51e6\u7406\u3001\u304a\u3088\u3073\u754c\u9762\u306e\u72b6\u614b\u306f\u3001\u53cd\u5fdc\u901f\u5ea6\u8ad6\u3084\u76ae\u819c\u306e\u5b89\u5b9a\u6027\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p><p>\u5b9f\u7528\u7684\u306a\u8a55\u4fa1\u3067\u306f\u3001\u69cb\u9020\u6e2c\u5b9a\u3068\u96fb\u6c17\u7684\u6e2c\u5b9a\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u3079\u304d\u3067\u3042\u308b\u3002XRD\u306f\u76f8\u5909\u5316\u306e\u7279\u5b9a\u306b\u5f79\u7acb\u3061\u3001\u30b7\u30fc\u30c8\u62b5\u6297\u6e2c\u5b9a\u306f\u96fb\u6c17\u7684\u7279\u6027\u304c\u4e88\u60f3\u901a\u308a\u306b\u5909\u5316\u3057\u3066\u3044\u308b\u304b\u3069\u3046\u304b\u3092\u793a\u3059\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u5f62\u614b\u3084\u754c\u9762\u306e\u52a3\u5316\u304c\u7591\u308f\u308c\u308b\u5834\u5408\u306f\u3001SEM\u307e\u305f\u306fTEM\u304c\u8ffd\u52a0\u60c5\u5831\u3092\u63d0\u4f9b\u3067\u304d\u308b\u3002<\/p><p>\u6700\u9069\u306a\u30a2\u30cb\u30fc\u30eb\u6761\u4ef6\u3068\u306f\u3001\u8a31\u5bb9\u3067\u304d\u306a\u3044\u51dd\u96c6\u3001\u62e1\u6563\u3001\u307e\u305f\u306f\u819c\u306e\u9023\u7d9a\u6027\u306e\u55aa\u5931\u3092\u5f15\u304d\u8d77\u3053\u3059\u3053\u3068\u306a\u304f\u3001\u8981\u6c42\u3055\u308c\u308b\u76f8\u304a\u3088\u3073\u96fb\u6c17\u7684\u6027\u80fd\u3092\u9054\u6210\u3067\u304d\u308b\u6761\u4ef6\u3067\u3042\u308b\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-cd2e8b0 elementor-widget elementor-widget-heading\" data-id=\"cd2e8b0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">6. \u30b7\u30ea\u30b5\u30a4\u30c9\u8584\u819c\u306e\u4e00\u822c\u7684\u306a\u554f\u984c\u70b9\u3068\u78ba\u8a8d\u3059\u3079\u304d\u4e8b\u9805<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-18ae21e elementor-widget elementor-widget-text-editor\" data-id=\"18ae21e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p data-pm-slice=\"1 1 []\">\u30b7\u30ea\u30b5\u30a4\u30c9\u819c\u306f\u3001\u6210\u819c\u6642\u3084\u71b1\u51e6\u7406\u306e\u904e\u7a0b\u3067\u3055\u307e\u3056\u307e\u306a\u7a2e\u985e\u306e\u6b20\u9665\u304c\u751f\u3058\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002\u30c8\u30e9\u30d6\u30eb\u30b7\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u7b2c\u4e00\u6b69\u306f\u3001\u554f\u984c\u304c\u539f\u6599\u3001\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u3001\u57fa\u677f\u3001\u3042\u308b\u3044\u306f\u6210\u819c\u5f8c\u306e\u51e6\u7406\u306e\u3044\u305a\u308c\u306b\u8d77\u56e0\u3059\u308b\u304b\u3092\u7279\u5b9a\u3059\u308b\u3053\u3068\u3067\u3059\u3002<\/p><table style=\"border-collapse: collapse; width: 100%;\"><tbody><tr><td style=\"width: 33.6909%; border-style: solid; border-color: #808080; text-align: center;\"><strong>\u89b3\u5bdf\u3055\u308c\u305f\u554f\u984c<\/strong><\/td><td style=\"width: 66.3091%; border-style: solid; border-color: #808080; text-align: center;\"><strong>\u8abf\u67fb\u3059\u3079\u304d\u8003\u3048\u3089\u308c\u308b\u8981\u56e0<\/strong><\/td><\/tr><tr><td style=\"width: 33.6909%; border-style: solid; border-color: #808080; text-align: center;\">\u4e88\u60f3\u3088\u308a\u3082\u9ad8\u3044\u62b5\u6297\u7387<\/td><td style=\"width: 66.3091%; border-style: solid; border-color: #808080; text-align: center;\">\u76f8\u7d44\u6210\u3001\u819c\u539a\u3001\u4e0d\u7d14\u7269\u3001\u7d50\u6676\u7c92\u69cb\u9020\u3001\u304a\u3088\u3073\u754c\u9762\u306e\u54c1\u8cea<\/td><\/tr><tr><td style=\"width: 33.6909%; border-style: solid; border-color: #808080; text-align: center;\">\u819c\u7d44\u6210\u306e\u4e0d\u5747\u4e00<\/td><td style=\"width: 66.3091%; border-style: solid; border-color: #808080; text-align: center;\">\u30bf\u30fc\u30b2\u30c3\u30c8\u7d44\u6210\u3001\u512a\u5148\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3001\u304a\u3088\u3073\u57fa\u677f\u306e\u4f4d\u7f6e<\/td><\/tr><tr><td style=\"width: 33.6909%; border-style: solid; border-color: #808080; text-align: center;\">\u819c\u306e\u51dd\u96c6<\/td><td style=\"width: 66.3091%; border-style: solid; border-color: #808080; text-align: center;\">\u904e\u5ea6\u306a\u71b1\u66dd\u9732\u3001\u819c\u539a\u3001\u8868\u9762\u30a8\u30cd\u30eb\u30ae\u30fc\u3001\u304a\u3088\u3073\u57fa\u677f\u306e\u72b6\u614b<\/td><\/tr><tr><td style=\"width: 33.6909%; border-style: solid; border-color: #808080; text-align: center;\">\u819c\u539a\u306e\u4e0d\u5747\u4e00\u6027<\/td><td style=\"width: 66.3091%; border-style: solid; border-color: #808080; text-align: center;\">\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u5f62\u72b6\u3001\u6210\u819c\u69cb\u6210\u3001\u57fa\u677f\u306e\u79fb\u52d5\u3001\u304a\u3088\u3073\u30d7\u30ed\u30bb\u30b9\u30d1\u30e9\u30e1\u30fc\u30bf<\/td><\/tr><tr><td style=\"width: 33.6909%; border-style: solid; border-color: #808080; text-align: center;\">\u4e88\u671f\u305b\u306c\u7d50\u6676\u76f8<\/td><td style=\"width: 66.3091%; border-style: solid; border-color: #808080; text-align: center;\">\u53cd\u5fdc\u6e29\u5ea6\u3001\u30a2\u30cb\u30fc\u30eb\u6642\u9593\u3001\u521d\u671f\u7d44\u6210\u3001\u304a\u3088\u3073\u6c5a\u67d3<\/td><\/tr><tr><td style=\"width: 33.6909%; border-style: solid; border-color: #808080; text-align: center;\">\u754c\u9762\u52a3\u5316<\/td><td style=\"width: 66.3091%; border-style: solid; border-color: #808080; text-align: center;\">\u8868\u9762\u51e6\u7406\u3001\u71b1\u53ce\u652f\u3001\u62e1\u6563\u3001\u304a\u3088\u3073\u754c\u9762\u53cd\u5fdc<\/td><\/tr><tr><td style=\"width: 33.6909%; border-style: solid; border-color: #808080; text-align: center;\">\u30ed\u30c3\u30c8\u9593\u306e\u3070\u3089\u3064\u304d<\/td><td style=\"width: 66.3091%; border-style: solid; border-color: #808080; text-align: center;\">\u539f\u6599\u306e\u4e00\u8cab\u6027\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u72b6\u614b\u3001\u88c5\u7f6e\u306e\u4f7f\u7528\u5c65\u6b74\u3001\u304a\u3088\u3073\u30d7\u30ed\u30bb\u30b9\u306e\u518d\u73fe\u6027<\/td><\/tr><\/tbody><\/table><p data-pm-slice=\"1 1 []\">\u3053\u308c\u3089\u306f\u3001\u666e\u904d\u7684\u306a\u8aac\u660e\u3068\u3044\u3046\u3088\u308a\u306f\u3001\u8abf\u67fb\u3059\u3079\u304d\u30dd\u30a4\u30f3\u30c8\u3067\u3042\u308b\u3002\u4f8b\u3048\u3070\u3001\u62b5\u6297\u7387\u304c\u9ad8\u3044\u304b\u3089\u3068\u3044\u3063\u3066\u3001\u5fc5\u305a\u3057\u3082\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u54c1\u8cea\u306b\u554f\u984c\u304c\u3042\u308b\u3068\u306f\u9650\u3089\u306a\u3044\u3002\u305d\u308c\u306f\u3001\u6210\u819c\u3055\u308c\u305f\u819c\u306e\u76f8\u3001\u539a\u3055\u3001\u5fae\u7d30\u69cb\u9020\u3001\u3042\u308b\u3044\u306f\u754c\u9762\u306b\u8d77\u56e0\u3057\u3066\u3044\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002<\/p><p>\u540c\u69d8\u306b\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u3068\u819c\u306e\u7d44\u6210\u306e\u9055\u3044\u304c\u3001\u5fc5\u305a\u3057\u3082\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u6b20\u9665\u3092\u793a\u3057\u3066\u3044\u308b\u308f\u3051\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u6210\u819c\u6761\u4ef6\u3084\u6750\u6599\u306b\u4f9d\u5b58\u3059\u308b\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6319\u52d5\u306b\u3064\u3044\u3066\u3082\u691c\u8a0e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p><p>\u6709\u7528\u306a\u30c8\u30e9\u30d6\u30eb\u30b7\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u624b\u9806\u306f\u4ee5\u4e0b\u306e\u901a\u308a\u3067\u3059\uff1a<\/p><ol start=\"1\" data-spread=\"false\"><li><p>\u5316\u5b66\u7d44\u6210\u304a\u3088\u3073\u6750\u6599\u306e\u7279\u5b9a\u3092\u78ba\u8a8d\u3059\u308b\u3002<\/p><\/li><li><p>\u30bf\u30fc\u30b2\u30c3\u30c8\u307e\u305f\u306f\u30bd\u30fc\u30b9\u6750\u6599\u306e\u72b6\u614b\u3092\u78ba\u8a8d\u3059\u308b\u3002<\/p><\/li><li><p>\u6210\u819c\u8a18\u9332\u3068\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3092\u78ba\u8a8d\u3059\u308b\u3002<\/p><\/li><li><p>\u819c\u539a\u3068\u30b7\u30fc\u30c8\u62b5\u6297\u3092\u6e2c\u5b9a\u3059\u308b\u3002<\/p><\/li><li><p>\u5fc5\u8981\u306b\u5fdc\u3058\u3066\u3001XRD\u3092\u7528\u3044\u3066\u7d50\u6676\u76f8\u3092\u7279\u5b9a\u3059\u308b\u3002<\/p><\/li><li><p>\u521d\u671f\u306e\u7d50\u679c\u304b\u3089\u69cb\u9020\u4e0a\u306e\u554f\u984c\u304c\u793a\u5506\u3055\u308c\u308b\u5834\u5408\u306f\u3001\u8868\u9762\u304a\u3088\u3073\u754c\u9762\u306e\u5f62\u614b\u3092\u8abf\u67fb\u3059\u308b\u3002<\/p><\/li><li><p>\u30d0\u30c3\u30c1\u9593\u304a\u3088\u3073\u30d7\u30ed\u30bb\u30b9\u5b9f\u884c\u9593\u306e\u7d50\u679c\u3092\u6bd4\u8f03\u3057\u307e\u3059\u3002<\/p><\/li><\/ol><p>\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u9078\u5b9a\u304a\u3088\u3073\u54c1\u8cea\u306b\u95a2\u3059\u308b\u3088\u308a\u8a73\u7d30\u306a\u60c5\u5831\u306b\u3064\u3044\u3066\u306f\u3001ULPMAT\u306e<span style=\"color: #0000ff;\"><a style=\"color: #0000ff;\" href=\"https:\/\/ulpmat.com\/ja\/product-category\/%e8%96%84%e8%86%9c%e5%a0%86%e7%a9%8d%e6%9d%90%e6%96%99\/\">\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8\u88fd\u54c1\u30ab\u30c6\u30b4\u30ea<\/a><\/span>\u3092\u3054\u89a7\u304f\u3060\u3055\u3044<span style=\"color: #0000ff;\">\u3002<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ef7d34d elementor-widget elementor-widget-heading\" data-id=\"ef7d34d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">7. \u30b7\u30ea\u30b5\u30a4\u30c9\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u9078\u5b9a\u65b9\u6cd5<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d81b4a3 elementor-widget elementor-widget-text-editor\" data-id=\"d81b4a3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p data-pm-slice=\"1 1 []\">\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3092\u6210\u819c\u6cd5\u3068\u3057\u3066\u9078\u629e\u3059\u308b\u5834\u5408\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u306f\u3001\u76ee\u7684\u3068\u3059\u308b\u819c\u304a\u3088\u3073\u6210\u819c\u30b7\u30b9\u30c6\u30e0\u306e\u8981\u4ef6\u306b\u57fa\u3065\u3044\u3066\u8a55\u4fa1\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p><p><strong>\u5316\u5b66\u7d44\u6210<\/strong><\/p><p>\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u516c\u79f0\u5f0f\u304a\u3088\u3073\u5143\u7d20\u6bd4\u3092\u78ba\u8a8d\u3057\u3066\u304f\u3060\u3055\u3044\u3002\u5316\u5408\u7269\u6750\u6599\u306e\u5834\u5408\u3001\u7d44\u6210\u304c\u76f8\u306e\u5f62\u6210\u3084\u819c\u306e\u7279\u6027\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u305f\u3081\u3001\u5316\u5b66\u91cf\u8ad6\u6bd4\u304c\u7279\u306b\u91cd\u8981\u306b\u306a\u308a\u307e\u3059\u3002<\/p><p><strong>\u7d14\u5ea6\u3068\u4e0d\u7d14\u7269<\/strong><\/p><p>\u5fc5\u8981\u306a\u7d14\u5ea6\u306f\u7528\u9014\u306b\u3088\u3063\u3066\u7570\u306a\u308a\u307e\u3059\u3002\u5fae\u91cf\u306e\u4e0d\u7d14\u7269\u306f\u3001\u7279\u306b\u9ad8\u611f\u5ea6\u306a\u96fb\u5b50\u6a5f\u5668\u7528\u9014\u306b\u304a\u3044\u3066\u3001\u96fb\u6c17\u7684\u6319\u52d5\u3001\u76f8\u306e\u5f62\u6210\u3001\u307e\u305f\u306f\u819c\u306e\u4fe1\u983c\u6027\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p><p>\u516c\u79f0\u306e\u7d14\u5ea6\u5024\u306e\u307f\u306b\u983c\u308b\u306e\u3067\u306f\u306a\u304f\u3001\u5165\u624b\u53ef\u80fd\u306a\u7d44\u6210\u60c5\u5831\u3084\u88cf\u4ed8\u3051\u3068\u306a\u308b\u6587\u66f8\u3092\u8acb\u6c42\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/p><p><strong>\u76f8\u7d44\u6210<\/strong><\/p><p>\u7d50\u6676\u76f8\u304c\u91cd\u8981\u306a\u5834\u5408\u306f\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u76f8\u7d44\u6210\u304c\u898f\u5b9a\u3055\u308c\u3066\u3044\u308b\u304b\u3001\u3042\u308b\u3044\u306f\u7279\u6027\u8a55\u4fa1\u3055\u308c\u3066\u3044\u308b\u304b\u3092\u660e\u78ba\u306b\u3057\u3066\u304f\u3060\u3055\u3044\u3002\u307e\u305f\u3001\u6210\u819c\u3055\u308c\u305f\u819c\u304c\u305d\u306e\u5f8c\u306e\u51e6\u7406\u904e\u7a0b\u3067\u76f8\u5909\u5316\u3092\u8d77\u3053\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\u304b\u3069\u3046\u304b\u3082\u8003\u616e\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/p><p><strong>\u5bc6\u5ea6\u3068\u5fae\u7d30\u69cb\u9020<\/strong><\/p><p>\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u5bc6\u5ea6\u3001\u591a\u5b54\u7387\u3001\u304a\u3088\u3073\u5fae\u7d30\u69cb\u9020\u306e\u5747\u4e00\u6027\u306f\u3001\u6a5f\u68b0\u7684\u5b8c\u5168\u6027\u3084\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6319\u52d5\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u9069\u5207\u306a\u8981\u4ef6\u306f\u3001\u6750\u6599\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u5bf8\u6cd5\u3001\u304a\u3088\u3073\u88c5\u7f6e\u306e\u69cb\u6210\u306b\u3088\u3063\u3066\u7570\u306a\u308a\u307e\u3059\u3002<\/p><p><strong>\u5f62\u72b6\u304a\u3088\u3073\u5bf8\u6cd5<\/strong><\/p><p>\u30bf\u30fc\u30b2\u30c3\u30c8\u306f\u3001\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u3068\u4e92\u63db\u6027\u304c\u3042\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u5bf8\u6cd5\u3001\u5f62\u72b6\u3001\u539a\u3055\u3001\u53d6\u308a\u4ed8\u3051\u8981\u4ef6\u3001\u304a\u3088\u3073\u30d0\u30c3\u30ad\u30f3\u30b0\u30d7\u30ec\u30fc\u30c8\u304c\u5fc5\u8981\u304b\u3069\u3046\u304b\u3092\u78ba\u8a8d\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/p><p><strong><span style=\"color: #0000ff;\"><a style=\"color: #0000ff;\" href=\"https:\/\/ulpmat.com\/ja\/%e3%82%b5%e3%83%bc%e3%83%93%e3%82%b9\/%e3%82%bf%e3%83%bc%e3%82%b2%e3%83%83%e3%83%88%e3%83%bb%e3%83%9c%e3%83%b3%e3%83%87%e3%82%a3%e3%83%b3%e3%82%b0\/\">\u63a5\u5408<\/a> <\/span>\u304a\u3088\u3073\u6587\u66f8\u5316<\/strong><\/p><p>\u63a5\u5408\u3055\u308c\u305f\u30bf\u30fc\u30b2\u30c3\u30c8\u306b\u3064\u3044\u3066\u306f\u3001 <span style=\"color: #0000ff;\"><a style=\"color: #0000ff;\" href=\"https:\/\/ulpmat.com\/ja\/%e3%82%b5%e3%83%bc%e3%83%93%e3%82%b9\/%e3%82%bf%e3%83%bc%e3%82%b2%e3%83%83%e3%83%88%e3%83%bb%e3%83%9c%e3%83%b3%e3%83%87%e3%82%a3%e3%83%b3%e3%82%b0\/\">\u63a5\u5408<\/a> <\/span>\u69cb\u6210\u304a\u3088\u3073\u95a2\u9023\u3059\u308b\u691c\u67fb\u3084\u6587\u66f8\u5316\u306e\u8981\u4ef6\u3092\u660e\u78ba\u306b\u3057\u3066\u304f\u3060\u3055\u3044\u3002\u5229\u7528\u53ef\u80fd\u306a\u6587\u66f8\u306b\u306f\u3001 <span style=\"color: #0000ff;\"><a style=\"color: #0000ff;\" href=\"https:\/\/ulpmat.com\/ja\/%e3%83%89%e3%82%ad%e3%83%a5%e3%83%a1%e3%83%b3%e3%83%88\/%e5%88%86%e6%9e%90%e8%a8%bc%e6%98%8e%e6%9b%b8\/\">\u5206\u6790\u8a3c\u660e\u66f8\uff08COA\uff09\u3001<\/a> <a style=\"color: #0000ff;\" href=\"https:\/\/ulpmat.com\/ja\/%e3%83%89%e3%82%ad%e3%83%a5%e3%83%a1%e3%83%b3%e3%83%88\/%e3%83%86%e3%82%af%e3%83%8b%e3%82%ab%e3%83%ab%e3%83%bb%e3%83%87%e3%83%bc%e3%82%bf%e3%82%b7%e3%83%bc%e3%83%88\/\">\u6280\u8853\u30c7\u30fc\u30bf\u30b7\u30fc\u30c8\uff08TDS\uff09\u3001\u304a\u3088\u3073\u88fd\u54c1\u3084\u6ce8\u6587\u306b\u5fdc\u3058\u3066\u305d\u306e\u4ed6\u306e\u54c1\u8cea\u8a18\u9332\u306a\u3069\u304c\u542b\u307e\u308c\u307e\u3059\u3002<\/a><\/span>\u3001\u304a\u3088\u3073\u305d\u306e\u4ed6\u306e\u54c1\u8cea\u8a18\u9332\u306a\u3069\u304c\u6319\u3052\u3089\u308c\u307e\u3059\uff08\u88fd\u54c1\u3084\u6ce8\u6587\u5185\u5bb9\u306b\u3088\u3063\u3066\u7570\u306a\u308a\u307e\u3059\uff09\u3002<\/p><p>\u4ed5\u69d8\u3092\u78ba\u5b9a\u3059\u308b\u524d\u306b\u3001\u4e88\u5b9a\u3055\u308c\u3066\u3044\u308b\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u3001\u76ee\u6a19\u5bf8\u6cd5\u3001\u57fa\u677f\u3001\u304a\u3088\u3073\u819c\u306e\u8981\u4ef6\u3092\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306b\u4f1d\u3048\u3066\u304f\u3060\u3055\u3044\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4d0b31e elementor-widget elementor-widget-image\" data-id=\"4d0b31e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"750\" height=\"500\" src=\"https:\/\/ulpmat.com\/wp-content\/uploads\/2026\/11\/silicide-thin-film-deposition-ulpmat-sputtering-target1.jpg\" class=\"attachment-large size-large wp-image-60274\" alt=\"\u30b7\u30ea\u30b5\u30a4\u30c9\u8584\u819c\u6210\u819c \u2013 ULPMAT\u793e\u88fd\u30b7\u30ea\u30b5\u30a4\u30c9\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8\" srcset=\"https:\/\/ulpmat.com\/wp-content\/uploads\/2026\/11\/silicide-thin-film-deposition-ulpmat-sputtering-target1.jpg 750w, https:\/\/ulpmat.com\/wp-content\/uploads\/2026\/11\/silicide-thin-film-deposition-ulpmat-sputtering-target1-300x200.jpg 300w, https:\/\/ulpmat.com\/wp-content\/uploads\/2026\/11\/silicide-thin-film-deposition-ulpmat-sputtering-target1-600x400.jpg 600w\" sizes=\"(max-width: 750px) 100vw, 750px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4943757 elementor-widget elementor-widget-heading\" data-id=\"4943757\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">8. \u30b7\u30ea\u30b5\u30a4\u30c9\u7c89\u672b\u304b\u3089\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8\u3078<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e1d55d5 elementor-widget elementor-widget-text-editor\" data-id=\"e1d55d5\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p data-pm-slice=\"1 1 []\">\u7c89\u672b\u306e\u7279\u6027\u306f\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u88fd\u9020\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u304c\u3001\u7c89\u672b\u306e\u4ed5\u69d8\u3060\u3051\u3067\u306f\u5b8c\u6210\u3057\u305f\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u54c1\u8cea\u304c\u6c7a\u307e\u308b\u308f\u3051\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p><p>\u4e00\u822c\u7684\u306a\u7c89\u672b\u51b6\u91d1\u30d7\u30ed\u30bb\u30b9\u306b\u306f\u3001\u4ee5\u4e0b\u306e\u3044\u304f\u3064\u304b\u306e\u6bb5\u968e\u304c\u542b\u307e\u308c\u307e\u3059\u3002<\/p><ol start=\"1\" data-spread=\"false\"><li><p><strong>\u539f\u6599\u306e\u9078\u5b9a\uff1a<\/strong>\u5316\u5b66\u7d44\u6210\u3001\u7d14\u5ea6\u3001\u304a\u3088\u3073\u5fc5\u8981\u306a\u30b1\u30a4\u5316\u7269\u76f8\u3092\u78ba\u8a8d\u3057\u307e\u3059\u3002<\/p><\/li><li><p><strong>\u7c89\u672b\u306e\u8abf\u88fd\uff1a<\/strong>\u7c92\u5b50\u5f84\u3001\u5f62\u614b\u3001\u9178\u7d20\u542b\u6709\u91cf\u3001\u304a\u3088\u3073\u6f5c\u5728\u7684\u306a\u6c5a\u67d3\u7269\u8cea\u3092\u8a55\u4fa1\u3059\u308b\u3002<\/p><\/li><li><p><strong>\u6df7\u5408\u304a\u3088\u3073\u6210\u5f62\uff1a<\/strong>\u6750\u6599\u3084\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u5fdc\u3058\u3066\u3001\u7c89\u672b\u3092\u8abf\u88fd\u3057\u3001\u9069\u5207\u306a\u6210\u5f62\u4f53\u3078\u3068\u6210\u5f62\u3059\u308b\u3002<\/p><\/li><li><p><strong>\u7dfb\u5bc6\u5316\uff1a<\/strong>\u9069\u5207\u306a\u5727\u7e2e\u307e\u305f\u306f\u713c\u7d50\u30d7\u30ed\u30bb\u30b9\u3092\u9069\u7528\u3059\u308b\u3002<\/p><\/li><li><p><strong>\u6a5f\u68b0\u52a0\u5de5\u304a\u3088\u3073\u4ed5\u4e0a\u3052\uff1a<\/strong>\u8981\u6c42\u3055\u308c\u308b\u5f62\u72b6\u304a\u3088\u3073\u8868\u9762\u72b6\u614b\u3092\u5b9f\u73fe\u3059\u308b\u3002<\/p><\/li><li><p><strong>\u691c\u67fb\uff1a<\/strong>\u5bf8\u6cd5\u3001\u5bc6\u5ea6\u3001\u7d44\u6210\u3001\u69cb\u9020\u306e\u5747\u4e00\u6027\u306a\u3069\u306e\u95a2\u9023\u7279\u6027\u3092\u8a55\u4fa1\u3059\u308b\u3002<\/p><\/li><\/ol><p>\u5b9f\u969b\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u6750\u6599\u306e\u6eb6\u878d\u6319\u52d5\u3001\u9178\u5316\u611f\u5ea6\u3001\u76f8\u306e\u5b89\u5b9a\u6027\u3001\u304a\u3088\u3073\u7dfb\u5bc6\u5316\u7279\u6027\u306b\u3088\u3063\u3066\u7570\u306a\u308a\u307e\u3059\u3002\u3059\u3079\u3066\u306e\u30b7\u30ea\u30b5\u30a4\u30c9\u304c\u3001\u540c\u3058\u88fd\u9020\u30d1\u30e9\u30e1\u30fc\u30bf\u3067\u51e6\u7406\u3067\u304d\u308b\u308f\u3051\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p><p>\u3053\u306e\u305f\u3081\u3001\u8cfc\u5165\u8005\u306f\u3001\u30b7\u30ea\u30b5\u30a4\u30c9\u7c89\u672b\u306e\u4ed5\u69d8\u3068\u3001\u5b8c\u6210\u3057\u305f\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u4ed5\u69d8\u3092\u533a\u5225\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u7d14\u5ea6\u3084\u30e1\u30c3\u30b7\u30e5\u30b5\u30a4\u30ba\u304c\u660e\u8a18\u3055\u308c\u305f\u7c89\u672b\u3067\u3042\u3063\u3066\u3082\u3001\u7279\u5b9a\u306e\u5bc6\u5ea6\u3001\u7d50\u5408\u54c1\u8cea\u3001\u307e\u305f\u306f\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6027\u80fd\u3092\u5099\u3048\u305f\u30bf\u30fc\u30b2\u30c3\u30c8\u304c\u81ea\u52d5\u7684\u306b\u4fdd\u8a3c\u3055\u308c\u308b\u308f\u3051\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e359795 elementor-widget elementor-widget-image\" data-id=\"e359795\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"750\" height=\"500\" src=\"https:\/\/ulpmat.com\/wp-content\/uploads\/2026\/11\/Silicide-Thin-Film-Deposition-\u2013-Silicide-Granules-by-ULPMAT1.jpg\" class=\"attachment-large size-large wp-image-60276\" alt=\"\u30b7\u30ea\u30b5\u30a4\u30c9\u8584\u819c\u306e\u6210\u819c \u2013 ULPMAT\u793e\u88fd\u30b7\u30ea\u30b5\u30a4\u30c9\u9846\u7c92\" srcset=\"https:\/\/ulpmat.com\/wp-content\/uploads\/2026\/11\/Silicide-Thin-Film-Deposition-\u2013-Silicide-Granules-by-ULPMAT1.jpg 750w, https:\/\/ulpmat.com\/wp-content\/uploads\/2026\/11\/Silicide-Thin-Film-Deposition-\u2013-Silicide-Granules-by-ULPMAT1-300x200.jpg 300w, https:\/\/ulpmat.com\/wp-content\/uploads\/2026\/11\/Silicide-Thin-Film-Deposition-\u2013-Silicide-Granules-by-ULPMAT1-600x400.jpg 600w\" sizes=\"(max-width: 750px) 100vw, 750px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-473a477 elementor-widget elementor-widget-heading\" data-id=\"473a477\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">9. ULPMAT\u304c\u63d0\u4f9b\u3059\u308b\u30b7\u30ea\u30b5\u30a4\u30c9\u6750\u6599<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-436557d elementor-widget elementor-widget-text-editor\" data-id=\"436557d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p data-pm-slice=\"1 1 []\">ULPMAT\u793e\u306f\u3001\u7814\u7a76\u304a\u3088\u3073\u7523\u696d\u7528\u6750\u6599\u958b\u767a\u5411\u3051\u306b\u3001\u7121\u6a5f\u7c89\u672b\u3084\u8584\u819c\u6210\u819c\u6750\u6599\u3092\u4f9b\u7d66\u3057\u3066\u3044\u307e\u3059\u3002\u540c\u793e\u306e\u88fd\u54c1\u30e9\u30a4\u30f3\u30ca\u30c3\u30d7\u306b\u306f\u3001\u30b7\u30ea\u30b5\u30a4\u30c9\u7c89\u672b\u306e\u307b\u304b\u3001\u91d1\u5c5e\u3001\u5408\u91d1\u3001\u30bb\u30e9\u30df\u30c3\u30af\u88fd\u306e\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8\u304c\u542b\u307e\u308c\u307e\u3059\u3002<\/p><p>\u4ee5\u4e0b\u306e\u30b7\u30ea\u30b5\u30a4\u30c9\u7c89\u672b\u306e\u30da\u30fc\u30b8\u3067\u306f\u3001\u63b2\u8f09\u3055\u308c\u3066\u3044\u308b\u6750\u6599\u304a\u3088\u3073\u4ed5\u69d8\u306e\u4f8b\u3092\u7d39\u4ecb\u3057\u3066\u3044\u307e\u3059\uff1a<\/p><ul data-spread=\"false\"><li><p><a href=\"https:\/\/ulpmat.com\/ja\/product\/%e7%8f%aa%e5%8c%96%e3%83%81%e3%82%bf%e3%83%b3-2\/\"><span style=\"color: #0000ff;\">\u30c1\u30bf\u30f3\u30b7\u30ea\u30b5\u30a4\u30c9\u7c89\u672b (TiSi\u2082)<\/span><\/a> \u2013 \u7d14\u5ea699.5%\u3001-325\u30e1\u30c3\u30b7\u30e5\u3067\u63b2\u8f09\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p><\/li><li><p><a href=\"https:\/\/ulpmat.com\/ja\/product\/%e3%82%b1%e3%82%a4%e5%8c%96%e3%82%bf%e3%83%b3%e3%82%b0%e3%82%b9%e3%83%86%e3%83%b3-2\/\">\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u30b7\u30ea\u30b5\u30a4\u30c9\u7c89\u672b (WSi\u2082)<\/a>\u2013 \u63b2\u8f09\u4ed5\u69d8\u306b\u306f\u3001-200\u30e1\u30c3\u30b7\u30e5\u3067\u7d14\u5ea699%\u3001-325\u30e1\u30c3\u30b7\u30e5\u3067\u7d14\u5ea699.5%\u304c\u542b\u307e\u308c\u307e\u3059\u3002<\/p><\/li><li><p><a href=\"https:\/\/ulpmat.com\/ja\/product\/%e3%83%8b%e3%82%aa%e3%83%96%e3%82%b7%e3%83%aa%e3%82%b5%e3%82%a4%e3%83%89-2\/\">\u30cb\u30aa\u30d6\u30b7\u30ea\u30b5\u30a4\u30c9\u7c89\u672b (NbSi\u2082)<\/a>\u2013 \u7d14\u5ea699%\u304a\u3088\u307399.5%\u3001\u3044\u305a\u308c\u3082-325\u30e1\u30c3\u30b7\u30e5\u3067\u63b2\u8f09\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p><\/li><li><p><a href=\"https:\/\/ulpmat.com\/ja\/product\/%e3%83%8b%e3%83%83%e3%82%b1%e3%83%ab%e3%82%b7%e3%83%aa%e3%82%b5%e3%82%a4%e3%83%89\/\">\u30cb\u30c3\u30b1\u30eb\u30b7\u30ea\u30b5\u30a4\u30c9\u7c89\u672b\uff08NiSi\u2082\uff09<\/a>\u2013 \u8a18\u8f09\u3055\u308c\u305f\u4ed5\u69d8\u306b\u306f\u3001-80\u30e1\u30c3\u30b7\u30e5\u306799\uff05\u3001-325\u30e1\u30c3\u30b7\u30e5\u306799.5\uff05\u304c\u542b\u307e\u308c\u307e\u3059\u3002<\/p><\/li><li><p><a href=\"https:\/\/ulpmat.com\/ja\/product\/%e3%82%b1%e3%82%a4%e5%8c%96%e3%83%9e%e3%82%b0%e3%83%8d%e3%82%b7%e3%82%a6%e3%83%a0-2\/\">\u30b1\u30a4\u5316\u30de\u30b0\u30cd\u30b7\u30a6\u30e0\u7c89\u672b\uff08Mg\u2082Si\uff09<\/a>\u2013 \u7d14\u5ea699%\u3001-200\u30e1\u30c3\u30b7\u30e5\u3067\u63b2\u8f09\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p><\/li><\/ul><p>\u3053\u308c\u3089\u306f\u7c89\u672b\u88fd\u54c1\u3067\u3042\u308a\u3001\u5404\u6750\u6599\u304c\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8\u3068\u3057\u3066\u5165\u624b\u53ef\u80fd\u3067\u3042\u308b\u3053\u3068\u3092\u793a\u3059\u3082\u306e\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u5165\u624b\u53ef\u80fd\u6027\u3001\u5bf8\u6cd5\u3001\u7d44\u6210\u3001\u304a\u3088\u3073\u52a0\u5de5\u8981\u4ef6\u306b\u3064\u3044\u3066\u306f\u3001\u5225\u9014\u3054\u78ba\u8a8d\u304f\u3060\u3055\u3044\u3002<\/p><p>ULPMAT\u306e\u53d6\u308a\u6271\u3044\u6750\u6599\u3084\u4e8b\u696d\u306b\u3064\u3044\u3066\u8a73\u3057\u304f\u77e5\u308a\u305f\u3044\u5834\u5408\u306f\u3001<span style=\"color: #0000ff;\"><a style=\"color: #0000ff;\" href=\"https:\/\/ulpmat.com\/ja\/%e4%bc%9a%e7%a4%be\/ulpmat%e3%81%ab%e3%81%a4%e3%81%84%e3%81%a6\/\">\u300cULPMAT\u306b\u3064\u3044\u3066<\/a><\/span>\u300d\u3092\u3054\u89a7\u304f\u3060\u3055\u3044<span style=\"color: #0000ff;\">\u3002<\/span>\u6750\u6599\u306e\u4ed5\u69d8\u3001\u88fd\u54c1\u306e\u5165\u624b\u53ef\u80fd\u6027\u3001\u307e\u305f\u306f\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u306b\u95a2\u3059\u308b\u3054\u8cea\u554f\u306b\u3064\u3044\u3066\u306f\u3001<span style=\"color: #0000ff;\"><a style=\"color: #0000ff;\" href=\"https:\/\/ulpmat.com\/ja\/%e4%bc%9a%e7%a4%be\/%e3%82%88%e3%81%8f%e3%81%82%e3%82%8b%e3%81%94%e8%b3%aa%e5%95%8f\/\">ULPMAT\u306eFAQ<\/a><\/span>\u3092\u3054\u89a7<span style=\"color: #0000ff;\">\u306b\u306a\u308b\u304b\u3001<a style=\"color: #0000ff;\" href=\"https:\/\/ulpmat.com\/ja\/%e3%81%8a%e5%95%8f%e3%81%84%e5%90%88%e3%82%8f%e3%81%9b\/\">ULPMAT\u30c1\u30fc\u30e0\u307e\u3067\u304a\u554f\u3044\u5408\u308f\u305b\u304f\u3060\u3055\u3044<\/a><\/span>\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-28d42ad elementor-widget elementor-widget-heading\" data-id=\"28d42ad\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u3088\u304f\u3042\u308b\u8cea\u554f<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a78bcd0 elementor-widget elementor-widget-eael-adv-accordion\" data-id=\"a78bcd0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"eael-adv-accordion.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t            <div class=\"eael-adv-accordion\" id=\"eael-adv-accordion-a78bcd0\" data-scroll-on-click=\"no\" data-scroll-speed=\"300\" data-accordion-id=\"a78bcd0\" data-accordion-type=\"accordion\" data-toogle-speed=\"300\">\n            <div class=\"eael-accordion-list\">\n\t\t\t\t\t<div id=\"1-\" class=\"elementor-tab-title eael-accordion-header\" tabindex=\"0\" data-tab=\"1\" aria-controls=\"elementor-tab-content-1751\"><span class=\"eael-advanced-accordion-icon-closed\"><svg aria-hidden=\"true\" class=\"fa-accordion-icon e-font-icon-svg e-fas-plus\" viewBox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span><span class=\"eael-advanced-accordion-icon-opened\"><svg aria-hidden=\"true\" class=\"fa-accordion-icon e-font-icon-svg e-fas-minus\" viewBox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span><span class=\"eael-accordion-tab-title\">1. \u30b7\u30ea\u30b5\u30a4\u30c9\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3068\u30b5\u30ea\u30b5\u30a4\u30c9\u51e6\u7406\u306e\u9055\u3044\u306f\u4f55\u3067\u3059\u304b\uff1f<\/span><svg aria-hidden=\"true\" class=\"fa-toggle e-font-icon-svg e-fas-angle-right\" viewBox=\"0 0 256 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M224.3 273l-136 136c-9.4 9.4-24.6 9.4-33.9 0l-22.6-22.6c-9.4-9.4-9.4-24.6 0-33.9l96.4-96.4-96.4-96.4c-9.4-9.4-9.4-24.6 0-33.9L54.3 103c9.4-9.4 24.6-9.4 33.9 0l136 136c9.5 9.4 9.5 24.6.1 34z\"><\/path><\/svg><\/div><div id=\"elementor-tab-content-1751\" class=\"eael-accordion-content clearfix\" data-tab=\"1\" aria-labelledby=\"1-\"><p>\u30b7\u30ea\u30b5\u30a4\u30c9\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306f\u3001\u7269\u7406\u6c17\u76f8\u6210\u9577\u6cd5\u3092\u7528\u3044\u3066\u3001\u56fa\u4f53\u30bf\u30fc\u30b2\u30c3\u30c8\u304b\u3089\u57fa\u677f\u4e0a\u306b\u6750\u6599\u3092\u5806\u7a4d\u3055\u305b\u308b\u624b\u6cd5\u3067\u3042\u308b\u3002\u4e00\u65b9\u3001\u30b5\u30ea\u30b5\u30a4\u30c9\u306f\u3001\u71b1\u51e6\u7406\u306e\u904e\u7a0b\u3067\u5806\u7a4d\u3057\u305f\u91d1\u5c5e\u3068\u9732\u51fa\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u3068\u306e\u53cd\u5fdc\u306b\u3088\u308a\u30b7\u30ea\u30b5\u30a4\u30c9\u3092\u5f62\u6210\u3059\u308b\u3002\u3053\u308c\u30892\u3064\u306e\u624b\u6cd5\u306f\u3001\u6750\u6599\u306e\u5f62\u6210\u30e1\u30ab\u30cb\u30ba\u30e0\u304c\u7570\u306a\u308b\u3002<\/p>\n<\/div>\n\t\t\t\t\t<\/div><div class=\"eael-accordion-list\">\n\t\t\t\t\t<div id=\"2-tisic49c54\" class=\"elementor-tab-title eael-accordion-header\" tabindex=\"0\" data-tab=\"2\" aria-controls=\"elementor-tab-content-1752\"><span class=\"eael-advanced-accordion-icon-closed\"><svg aria-hidden=\"true\" class=\"fa-accordion-icon e-font-icon-svg e-fas-plus\" viewBox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span><span class=\"eael-advanced-accordion-icon-opened\"><svg aria-hidden=\"true\" class=\"fa-accordion-icon e-font-icon-svg e-fas-minus\" viewBox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span><span class=\"eael-accordion-tab-title\">2. TiSi\u2082\u306b\u304a\u3044\u3066\u3001C49\u304b\u3089C54\u3078\u306e\u8ee2\u79fb\u306f\u306a\u305c\u91cd\u8981\u306a\u306e\u3067\u3057\u3087\u3046\u304b\uff1f<\/span><svg aria-hidden=\"true\" class=\"fa-toggle e-font-icon-svg e-fas-angle-right\" viewBox=\"0 0 256 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M224.3 273l-136 136c-9.4 9.4-24.6 9.4-33.9 0l-22.6-22.6c-9.4-9.4-9.4-24.6 0-33.9l96.4-96.4-96.4-96.4c-9.4-9.4-9.4-24.6 0-33.9L54.3 103c9.4-9.4 24.6-9.4 33.9 0l136 136c9.5 9.4 9.5 24.6.1 34z\"><\/path><\/svg><\/div><div id=\"elementor-tab-content-1752\" class=\"eael-accordion-content clearfix\" data-tab=\"2\" aria-labelledby=\"2-tisic49c54\"><p>C49-TiSi\u2082\u306f\u6e96\u5b89\u5b9a\u76f8\u3067\u3042\u308b\u306e\u306b\u5bfe\u3057\u3001C54-TiSi\u2082\u306f\u4e00\u822c\u7684\u306b\u4f4e\u62b5\u6297\u3092\u4f34\u3046\u5b89\u5b9a\u76f8\u3067\u3042\u308b\u3002\u3057\u305f\u304c\u3063\u3066\u3001\u4f4e\u62b5\u6297\u306e\u30c1\u30bf\u30f3\u30b7\u30ea\u30b5\u30a4\u30c9\u304c\u6c42\u3081\u3089\u308c\u308b\u5834\u5408\u3001\u3053\u306e\u76f8\u8ee2\u79fb\u306f\u91cd\u8981\u3068\u306a\u308b\u3002\u305d\u306e\u8ee2\u79fb\u6761\u4ef6\u306f\u3001\u819c\u539a\u3001\u57fa\u677f\u306e\u914d\u5411\u3001\u5fae\u7d30\u69cb\u9020\u3001\u304a\u3088\u3073\u71b1\u5c65\u6b74\u306b\u3088\u3063\u3066\u5de6\u53f3\u3055\u308c\u308b\u3002<\/p>\n<\/div>\n\t\t\t\t\t<\/div><div class=\"eael-accordion-list\">\n\t\t\t\t\t<div id=\"3-nisinisi\" class=\"elementor-tab-title eael-accordion-header\" tabindex=\"0\" data-tab=\"3\" aria-controls=\"elementor-tab-content-1753\"><span class=\"eael-advanced-accordion-icon-closed\"><svg aria-hidden=\"true\" class=\"fa-accordion-icon e-font-icon-svg e-fas-plus\" viewBox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span><span class=\"eael-advanced-accordion-icon-opened\"><svg aria-hidden=\"true\" class=\"fa-accordion-icon e-font-icon-svg e-fas-minus\" viewBox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span><span class=\"eael-accordion-tab-title\">3. NiSi\u3068NiSi\u2082\u306f\u540c\u3058\u3082\u306e\u3067\u3059\u304b\uff1f<\/span><svg aria-hidden=\"true\" class=\"fa-toggle e-font-icon-svg e-fas-angle-right\" viewBox=\"0 0 256 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M224.3 273l-136 136c-9.4 9.4-24.6 9.4-33.9 0l-22.6-22.6c-9.4-9.4-9.4-24.6 0-33.9l96.4-96.4-96.4-96.4c-9.4-9.4-9.4-24.6 0-33.9L54.3 103c9.4-9.4 24.6-9.4 33.9 0l136 136c9.5 9.4 9.5 24.6.1 34z\"><\/path><\/svg><\/div><div id=\"elementor-tab-content-1753\" class=\"eael-accordion-content clearfix\" data-tab=\"3\" aria-labelledby=\"3-nisinisi\"><p>\u3044\u3044\u3048\u3002NiSi\u306f\u30cb\u30c3\u30b1\u30eb\u30e2\u30ce\u30b7\u30ea\u30b5\u30a4\u30c9\u3067\u3059\u304c\u3001NiSi\u2082\u306f\u30cb\u30c3\u30b1\u30eb\u30b8\u30b7\u30ea\u30b5\u30a4\u30c9\u3067\u3059\u3002\u3053\u308c\u3089\u306f\u76f8\u7279\u6027\u304c\u7570\u306a\u308b\u5225\u500b\u306e\u5316\u5408\u7269\u3067\u3042\u308b\u305f\u3081\u3001\u6750\u6599\u306e\u9078\u5b9a\u3084\u8584\u819c\u306e\u6e2c\u5b9a\u7d50\u679c\u306e\u89e3\u91c8\u306b\u3042\u305f\u3063\u3066\u306f\u3001\u305d\u308c\u305e\u308c\u500b\u5225\u306b\u6307\u5b9a\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n<\/div>\n\t\t\t\t\t<\/div><div class=\"eael-accordion-list\">\n\t\t\t\t\t<div id=\"4-\" class=\"elementor-tab-title eael-accordion-header\" tabindex=\"0\" data-tab=\"4\" aria-controls=\"elementor-tab-content-1754\"><span class=\"eael-advanced-accordion-icon-closed\"><svg aria-hidden=\"true\" class=\"fa-accordion-icon e-font-icon-svg e-fas-plus\" viewBox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span><span class=\"eael-advanced-accordion-icon-opened\"><svg aria-hidden=\"true\" class=\"fa-accordion-icon e-font-icon-svg e-fas-minus\" viewBox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span><span class=\"eael-accordion-tab-title\">4. \u30b7\u30ea\u30b5\u30a4\u30c9\u306e\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8\u3092\u4f7f\u7528\u3059\u308b\u3068\u3001\u307e\u3063\u305f\u304f\u540c\u3058\u7d44\u6210\u306e\u819c\u304c\u5f62\u6210\u3055\u308c\u308b\u306e\u3067\u3057\u3087\u3046\u304b\uff1f<\/span><svg aria-hidden=\"true\" class=\"fa-toggle e-font-icon-svg e-fas-angle-right\" viewBox=\"0 0 256 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M224.3 273l-136 136c-9.4 9.4-24.6 9.4-33.9 0l-22.6-22.6c-9.4-9.4-9.4-24.6 0-33.9l96.4-96.4-96.4-96.4c-9.4-9.4-9.4-24.6 0-33.9L54.3 103c9.4-9.4 24.6-9.4 33.9 0l136 136c9.5 9.4 9.5 24.6.1 34z\"><\/path><\/svg><\/div><div id=\"elementor-tab-content-1754\" class=\"eael-accordion-content clearfix\" data-tab=\"4\" aria-labelledby=\"4-\"><p>\u5fc5\u305a\u3057\u3082\u305d\u3046\u3068\u306f\u9650\u308a\u307e\u305b\u3093\u3002\u6210\u819c\u3055\u308c\u305f\u819c\u306f\u3001\u512a\u5148\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3001\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u3001\u57fa\u677f\u6e29\u5ea6\u3001\u304a\u3088\u3073\u6210\u819c\u5f8c\u306e\u53cd\u5fdc\u306b\u3088\u3063\u3066\u5f71\u97ff\u3092\u53d7\u3051\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u7528\u9014\u306b\u304a\u3044\u3066\u819c\u306e\u7d44\u6210\u304c\u91cd\u8981\u306a\u5834\u5408\u306f\u3001\u305d\u306e\u7d44\u6210\u3092\u78ba\u8a8d\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n<\/div>\n\t\t\t\t\t<\/div><div class=\"eael-accordion-list\">\n\t\t\t\t\t<div id=\"5-\" class=\"elementor-tab-title eael-accordion-header\" tabindex=\"0\" data-tab=\"5\" aria-controls=\"elementor-tab-content-1755\"><span class=\"eael-advanced-accordion-icon-closed\"><svg aria-hidden=\"true\" class=\"fa-accordion-icon e-font-icon-svg e-fas-plus\" viewBox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span><span class=\"eael-advanced-accordion-icon-opened\"><svg aria-hidden=\"true\" class=\"fa-accordion-icon e-font-icon-svg e-fas-minus\" viewBox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span><span class=\"eael-accordion-tab-title\">5. \u30b7\u30ea\u30b5\u30a4\u30c9\u8584\u819c\u306e\u7279\u6027\u8a55\u4fa1\u306b\u306f\u3001\u3069\u306e\u3088\u3046\u306a\u624b\u6cd5\u304c\u6709\u7528\u304b\uff1f<\/span><svg aria-hidden=\"true\" class=\"fa-toggle e-font-icon-svg e-fas-angle-right\" viewBox=\"0 0 256 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M224.3 273l-136 136c-9.4 9.4-24.6 9.4-33.9 0l-22.6-22.6c-9.4-9.4-9.4-24.6 0-33.9l96.4-96.4-96.4-96.4c-9.4-9.4-9.4-24.6 0-33.9L54.3 103c9.4-9.4 24.6-9.4 33.9 0l136 136c9.5 9.4 9.5 24.6.1 34z\"><\/path><\/svg><\/div><div id=\"elementor-tab-content-1755\" class=\"eael-accordion-content clearfix\" data-tab=\"5\" aria-labelledby=\"5-\"><p>XRD\u306f\u7d50\u6676\u76f8\u306e\u540c\u5b9a\u306b\u6709\u7528\u3067\u3059\u30024\u70b9\u30d7\u30ed\u30fc\u30d6\u6cd5\u306b\u3088\u308b\u6e2c\u5b9a\u3067\u306f\u30b7\u30fc\u30c8\u62b5\u6297\u3092\u8a55\u4fa1\u3067\u304d\u3001SEM\u3084TEM\u306f\u5f62\u614b\u3084\u754c\u9762\u306e\u89b3\u5bdf\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002EDS\u306f\u5143\u7d20\u5206\u5e03\u306b\u95a2\u3059\u308b\u60c5\u5831\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002\u3069\u306e\u624b\u6cd5\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u304b\u306f\u3001\u5bfe\u8c61\u3068\u306a\u308b\u8584\u819c\u3084\u8abf\u67fb\u5bfe\u8c61\u306e\u7279\u6027\u306b\u3088\u3063\u3066\u7570\u306a\u308a\u307e\u3059\u3002<\/p>\n<\/div>\n\t\t\t\t\t<\/div><div class=\"eael-accordion-list\">\n\t\t\t\t\t<div id=\"6-\" class=\"elementor-tab-title eael-accordion-header\" tabindex=\"0\" data-tab=\"6\" aria-controls=\"elementor-tab-content-1756\"><span class=\"eael-advanced-accordion-icon-closed\"><svg aria-hidden=\"true\" class=\"fa-accordion-icon e-font-icon-svg e-fas-plus\" viewBox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span><span class=\"eael-advanced-accordion-icon-opened\"><svg aria-hidden=\"true\" class=\"fa-accordion-icon e-font-icon-svg e-fas-minus\" viewBox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span><span class=\"eael-accordion-tab-title\">6. \u30b7\u30ea\u30b5\u30a4\u30c9\u7c89\u672b\u306f\u3001\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8\u3068\u3057\u3066\u305d\u306e\u307e\u307e\u4f7f\u7528\u3067\u304d\u307e\u3059\u304b\uff1f<\/span><svg aria-hidden=\"true\" class=\"fa-toggle e-font-icon-svg e-fas-angle-right\" viewBox=\"0 0 256 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M224.3 273l-136 136c-9.4 9.4-24.6 9.4-33.9 0l-22.6-22.6c-9.4-9.4-9.4-24.6 0-33.9l96.4-96.4-96.4-96.4c-9.4-9.4-9.4-24.6 0-33.9L54.3 103c9.4-9.4 24.6-9.4 33.9 0l136 136c9.5 9.4 9.5 24.6.1 34z\"><\/path><\/svg><\/div><div id=\"elementor-tab-content-1756\" class=\"eael-accordion-content clearfix\" data-tab=\"6\" aria-labelledby=\"6-\"><p>\u901a\u5e38\u3001\u3055\u3089\u306a\u308b\u52a0\u5de5\u306a\u3057\u3067\u306f\u4f7f\u7528\u3067\u304d\u307e\u305b\u3093\u3002\u7c89\u672b\u306f\u3001\u9069\u5207\u306a\u5bf8\u6cd5\u3001\u5bc6\u5ea6\u3001\u6a5f\u68b0\u7684\u5f37\u5ea6\u3001\u304a\u3088\u3073\u305d\u306e\u4ed6\u306e\u7528\u9014\u56fa\u6709\u306e\u7279\u6027\u3092\u5099\u3048\u305f\u30bf\u30fc\u30b2\u30c3\u30c8\u306b\u6210\u5f62\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u7c89\u672b\u306e\u7d14\u5ea6\u3084\u7c92\u5b50\u5f84\u306f\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u5168\u4f53\u7684\u306a\u4ed5\u69d8\u306e\u4e00\u90e8\u306b\u904e\u304e\u307e\u305b\u3093\u3002<\/p>\n<\/div>\n\t\t\t\t\t<\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2fab1d9 elementor-widget elementor-widget-heading\" data-id=\"2fab1d9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u7d50\u8ad6<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ec56b79 elementor-widget elementor-widget-text-editor\" data-id=\"ec56b79\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p data-pm-slice=\"1 1 []\">\u30b7\u30ea\u30b5\u30a4\u30c9\u8584\u819c\u306e\u6027\u80fd\u306f\u3001\u6750\u6599\u7d44\u6210\u3001\u6210\u819c\u6cd5\u3001\u76f8\u306e\u5f62\u6210\u3001\u304a\u3088\u3073\u71b1\u51e6\u7406\u306e\u95a2\u4fc2\u306b\u5de6\u53f3\u3055\u308c\u307e\u3059\u3002\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3001\u30b5\u30ea\u30b5\u30a4\u30c9\u3001CVD\u306f\u3001\u30b7\u30ea\u30b5\u30a4\u30c9\u542b\u6709\u5c64\u3092\u5f62\u6210\u3059\u308b\u305f\u3081\u306e\u7570\u306a\u308b\u624b\u6cd5\u3067\u3042\u308a\u3001\u305d\u308c\u305e\u308c\u304c\u6750\u6599\u7cfb\u306b\u9069\u3057\u305f\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u3092\u5fc5\u8981\u3068\u3057\u307e\u3059\u3002<\/p><p>TiSi\u2082\u306e\u5834\u5408\u3001C49\u304b\u3089C54\u3078\u306e\u76f8\u8ee2\u79fb\u306f\u3001\u76f8\u5236\u5fa1\u304c\u516c\u79f0\u5316\u5b66\u7d44\u6210\u3068\u540c\u69d8\u306b\u91cd\u8981\u3067\u3042\u308b\u7406\u7531\u3092\u5982\u5b9f\u306b\u793a\u3057\u3066\u3044\u308b\u3002\u3088\u308a\u4e00\u822c\u7684\u306b\u306f\u3001\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u8a55\u4fa1\u3092\u884c\u3046\u305f\u3081\u306b\u306f\u3001\u6750\u6599\u4ed5\u69d8\u3068\u3001\u76f8\u306e\u540c\u5b9a\u3001\u96fb\u6c17\u7684\u6e2c\u5b9a\u3001\u5fae\u7d30\u69cb\u9020\u89e3\u6790\u3092\u542b\u3080\u8584\u819c\u30ec\u30d9\u30eb\u306e\u7279\u6027\u8a55\u4fa1\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002<\/p><p>\u30b7\u30ea\u30b5\u30a4\u30c9\u6750\u6599\u3084\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30bf\u30fc\u30b2\u30c3\u30c8\u3092\u9078\u5b9a\u3059\u308b\u969b\u306b\u306f\u3001\u60f3\u5b9a\u3055\u308c\u308b\u6210\u819c\u65b9\u6cd5\u3001\u7d44\u6210\u3001\u76f8\u306e\u8981\u4ef6\u3001\u57fa\u677f\u3068\u306e\u9069\u5408\u6027\u3001\u304a\u3088\u3073\u5165\u624b\u53ef\u80fd\u306a\u54c1\u8cea\u6587\u66f8\u3092\u8003\u616e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u8981\u56e0\u306f\u3001\u7d14\u5ea6\u3084\u540d\u76ee\u4e0a\u306e\u5316\u5b66\u5f0f\u306e\u307f\u3092\u57fa\u6e96\u3068\u3059\u308b\u3088\u308a\u3082\u3001\u6750\u6599\u306e\u9069\u5408\u6027\u3092\u8a55\u4fa1\u3059\u308b\u305f\u3081\u306e\u3088\u308a\u5b9f\u7528\u7684\u306a\u6839\u62e0\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ae33779 elementor-widget elementor-widget-heading\" data-id=\"ae33779\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u53c2\u8003\u6587\u732e<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1dac4a3 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"1dac4a3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">1. Jeon, H., Yoon, G., and Nemanich, R. J. \u300cC49\u2013C54 TiSi\u2082 \u76f8\u8ee2\u79fb\u6e29\u5ea6\u306e\u819c\u539a\u304a\u3088\u3073Si\u57fa\u677f\u306e\u914d\u5411\u3078\u306e\u4f9d\u5b58\u6027\u300d \u300eThin Solid Films\u300f, 299(1\u20132), 178\u2013182 (1997).<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">2. Harper, J. M. E., Cabral, C. Jr., \u304a\u3088\u3073 Lavoie, C. \u300c\u30c1\u30bf\u30f3\u30b7\u30ea\u30b5\u30a4\u30c9\u8d85\u5927\u898f\u6a21\u96c6\u7a4d\u56de\u8def\u30b3\u30f3\u30bf\u30af\u30c8\u306b\u304a\u3051\u308bC54\u76f8\u306e\u5f62\u6210\u3092\u4fc3\u9032\u3059\u308b\u30e1\u30ab\u30cb\u30ba\u30e0\u300d \u300eAnnual Review of Materials Research\u300f, 30, 523\u2013543 (2000).<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">3. \u30b9\u30bf\u30f3\u30d5\u30a9\u30fc\u30c9\u5927\u5b66\u3001EE311\u3001\u30b5\u30e9\u30b9\u30ef\u30c3\u30c8\u6559\u6388\u3002\u300c\u76f8\u4e92\u63a5\u7d9a\uff1a\u30b7\u30ea\u30b5\u30a4\u30c9\u300d\u3002\u8b1b\u7fa9\u30ce\u30fc\u30c8\u3002<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">4. \u300cKeiinbay, S., Nussupov, K. K., Beisenkhanov, N. B., \u304a\u3088\u3073 Volinsky, A. A. \u300c\u30b7\u30ea\u30b3\u30f3\u4e0a\u306e\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308bTi\u819c\u306b\u304a\u3051\u308b\u6025\u901f\u71b1\u30a2\u30cb\u30fc\u30eb\u6642\u306eTiSi\u2082\u76f8\u306e\u5f62\u6210\u300d \u300eNanomaterials\u300f, 16(19), 1258 (2026).<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">5. IEEE Technology Navigator. \u300c\u30b7\u30ea\u30b5\u30a4\u30c9\u300d<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3e4c230 elementor-widget elementor-widget-heading\" data-id=\"3e4c230\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u3054\u7528\u9014\u306b\u9069\u3057\u305f\u30b7\u30ea\u30b5\u30a4\u30c9\u6750\u6599\u3092\u304a\u63a2\u3057\u3067\u3059\u304b\uff1f<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6fcdf1b elementor-widget elementor-widget-text-editor\" data-id=\"6fcdf1b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u9069\u5207\u306a\u6750\u6599\u306e\u9078\u5b9a\u306b\u306f\u3001\u7d44\u6210\u3001\u7d14\u5ea6\u3001\u7c92\u5b50\u5f84\u3001\u304a\u3088\u3073\u52a0\u5de5\u8981\u4ef6\u304c\u8003\u616e\u3055\u308c\u307e\u3059\u3002\u5f53\u793e\u306e\u30b7\u30ea\u30b5\u30a4\u30c9\u6750\u6599\u3092\u3054\u89a7\u304f\u3060\u3055\u3044\u3002\u3042\u308b\u3044\u306f\u3001\u5177\u4f53\u7684\u306a\u3054\u8981\u4ef6\u306b\u3064\u3044\u3066\u3054\u76f8\u8ac7\u306e\u969b\u306f\u3001\u5f0a\u793e\u30c1\u30fc\u30e0\u307e\u3067\u304a\u554f\u3044\u5408\u308f\u305b\u304f\u3060\u3055\u3044\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-1fa1da8 e-grid e-con-full e-con e-child\" data-id=\"1fa1da8\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-166e3af elementor-widget elementor-widget-eael-creative-button\" data-id=\"166e3af\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"eael-creative-button.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t        <div class=\"eael-creative-button-wrapper\">\n\n            <a class=\"eael-creative-button eael-creative-button--default eael-cb-icon-position-\" href=\"https:\/\/ulpmat.com\/silicide-powders-selection\/\" data-text=\"\u884c\u3053\u3046\uff01\">\n            \t    \n                <div class=\"creative-button-inner\">\n\n                    \n                    <span class=\"cretive-button-text\">\u30b7\u30ea\u30b5\u30a4\u30c9\u6750\u6599\u306b\u3064\u3044\u3066\u8a73\u3057\u304f\u77e5\u308b<\/span>\n\n                                    <\/div>\n\t                        <\/a>\n        <\/div>\n        \t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-243cfc5 elementor-widget elementor-widget-eael-creative-button\" data-id=\"243cfc5\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"eael-creative-button.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t        <div class=\"eael-creative-button-wrapper\">\n\n            <a class=\"eael-creative-button eael-creative-button--default eael-cb-icon-position-\" href=\"https:\/\/ulpmat.com\/contact-us\/\" data-text=\"\u884c\u3053\u3046\uff01\">\n            \t    \n                <div class=\"creative-button-inner\">\n\n                    \n                    <span class=\"cretive-button-text\">\u3054\u8981\u671b\u306b\u3064\u3044\u3066\u3054\u76f8\u8ac7\u304f\u3060\u3055\u3044<\/span>\n\n                                    <\/div>\n\t                        <\/a>\n        <\/div>\n        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